二手 TEL / TOKYO ELECTRON Alpha 8S #155754 待售
看起来这件物品已经卖了。检查下面的类似产品或与我们联系,我们经验丰富的团队将为您找到它。
单击可缩放
已售出
ID: 155754
Furnace, 8"
Process: Poly
Safety specification: TEL Standard
System paint color: Biege white
System power rating:
AC200V, 3P / AC100V, 1P
Loading configuration:
(4) Loaders / (127) Wafer slots
Process pressure (Torr): Low pressure
Process temperature: 600º C
FTP Heater: Installed
Rapid cooling unit: Installed
Heater type: VOS-40-017
Process gases:
Process gas MFC 1,2,3,4: N2
Process gas MFC 5, 6: SiH4
Process gas MFC 7, 8, 9: PH3
Gas system:
Filter: MOTT Pou-20S-SV2, Ni
Air valve: FUJIKIN: Diaphragm type
Mega-mini and block
MFC: STEC SEC-74 Series
Check valve: FUJIKIN O-Ring seal type
Hand valve: FUJIKIN: Diaphragm type
Regulator: VERIFLO SQ Series
Pressure transducer: NAGANO ZT 17
Others:
Joint: Gasket type: Pure nickel type
Piping material: SUS316L Up tube
Piping working method: Welding
Welding methods: Automatic welding
Gas exhaust system:
Dry pump: EBARA A150W-T
Main valve: MKS 172-1080P
Vacuum gauge: MKS Baratron sensor normal type
Joint:
Gasket
JIS Method
Piping material: SUS316BA, stainless steel
APC: MKS 253B-3-80-2, butterfly valve
VG1: 0 to 10 Torr, Normal type
VG2: 0 to 1000 Torr, Normal type
VG3: ULVAC GP-2A, Pirani gauge
Manifold:
Structure:
Sealing method: End point sealing
Material: SUS316L Stainless steel
Port:
Gas port: 3/8" Ultra torr
Inner T/C port: 20DAI Ultra torr
Exhaust port: 3 DIA
Cooling method: Water cooling
Safety Interlock:
Gas flow low MFC:
Too low gas flow
Alarm: > 5%
Abort: ± 10%
Gas flow high MFC:
Too high gas flow
Alarm: > 5%
Abort: ± 10%
Low PCW flow:
No PCW supply
Alarm: > 3min
Abort: > 5min
Heater break down: > 7min
PCW Leak detection: Alarm
Process heater over temperature:
Chamber over heat
Heater break down: > 3 sec
Furnace area over temperature: Alarm
Heater break down: > 3 sec
SCR Area over temperature: Alarm
Heater break down: > 3 sec
Interruption of electric power: Alarm
Abort: < 3 sec
Heater break down: > 3 sec
Gas flow sequence: Alarm
Pump off: Alarm
Pump trouble: Alarm
Pressure low (reactor tube pressure): Alarm
Pressure high (reactor tube pressure): Alarm
Leak check (reactor tube pressure):
Main valve off delay: 10 min
Abort: > 20mTorr
Currently warehoused
1997 vintage.
TEL/TOKYO ELECTRON ALPHA 8S是一种扩散炉,旨在通过对半导体晶片的创新加热、提取和热处理,帮助优化和提炼半导体工艺。先进的热控设备允许对整个过程进行高精度的温度控制,产生一致的结果。TEL ALPHA-8S提供低温扫描和"节能"功能,安全可靠地创建最佳的焊接工艺和屏障膜涂层工艺。TOKYO ELECTRON ALPHA 8 S配备了可配置以保证无发射处理的高性能排气提取系统。它具有两个最高温度为1920 °C的电热加热器,为用户提供了一种高效、安全的退火和热处理样品的方法,并以可重复的方式提供一致的结果。TOKYO ELECTRON ALPHA-8 S进一步配备了连续的AUTO PECVD,并配有充气溷合器,能够快速方便的单元维护。TOKYO ELECTRON ALPHA 8S是一种全自动机器,既直观又用户友好。其健壮的设计包括增强的可编程性、强大的硬件控制以及用户定义的报警和程序序列设置等功能。该工具还具有可扩展性,允许用户随着时间的推移添加组件和升级功能。TEL Alpha 8S进一步配备了多个附件,确保安全无忧的体验。这些附件包括一个先进的过滤器资产,可以防止任何可能的污染。真空密封功能可实现高效、可重复的过程,而高性能散热器模型可确保整个样品的均匀性。最后,可选的PC Control模式允许用户轻松访问和管理数据和程序设置。ALPHA 8 S是一种高效高效的扩散炉,配有先进的特性和配件,以确保最高效的半导体工艺。其创新的设计和特点使该解决方桉成为一系列复杂且高度精确的热处理、退火和涂层工艺的理想选择。
还没有评论