二手 AMAT / APPLIED MATERIALS xR80 Leap II #9174553 待售
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ID: 9174553
Ion implanter, 8"
Processor module
Beam line module
Source services module
Processor rack
Heat exchanger / PDU
Mobile PC and desk
Monitor
Control module (VME)
Signal tower
TEM Probe
Mains matching TX
No VESDA smoke detector
No ISO TX
Beamline, controller PSU and assembly:
Pre accelerator / Mag controller
Vacuum controller
Post A controller
Turbo controllers
Focus PSU
A-Mag PSU
Pre A converter PSU
Source mag PSU
Suppression PSU
No Decel PSU
Beam path components, source / Extraction / Flight tube / MRS and PFS assy:
Source head type: IHC
Extraction type: Dual bellows
Flight tube
MRS
Pre defining
PFS Type: STD PFS
Gas cabinet (Source services):
Module: SDS / HP
GeF4: HP
BF3: HP
(2) Modules: SDS
Purge module
PSU, Controllers and assembly:
Gas and temperature controller
Filament PSU: XANTREX
Arc PSU
Bias PSU
DPS
Pre A HV stack
Source ISO TX
Vacuum system:
LEYBOLD 1000C Source turbo pump
LEYBOLD 361C MRS Turbo pump
TURBOTRONIK NT20 Turbo pump controller
EDWARDS QDP40 Beam line dry pump
CTI CTI-10 Side cryo pump
CTI CTI-10 Rear cryo pump
Processor PSU controller and assy:
Wheel and components
Spin motor
Gripper
Transfer arm
Clip actuator
Blade
A/B Sensor
Tilt assembly: 0-10
PFS DP Box
Beam stop
Beam profiler
Filament PSU (PFS)
Wafer loader / Mini environment assembly:
Carousel
Indexer
W/L Door
Orientor: Notch
(3) Cassettes / Trays
XR80 Arm servo PSU
XR80 Arm servo controller
Control rack:
DAQPDU
Target system
W/L Controller
W/L Vacuum
Ground PDU
Target system vacuum
Spin / Scan controller
Direct drive interface
Plasma flood chassis
Scan amplifier
Spin amplifier
Spin / Scan PDU
Bleed resistor
MOTECH 80
VME:
PMAC Vac / Atoms
CPU Main board
Loop controller
Energy level: 2-80 keV
1997 vintage.
AMAT/APPLIED MATERIALS xR80 Leap II是一种离子植入器和监测器,专门设计用于制造半导体晶片。它允许将离子高精度植入材料,从而产生高度均匀的掺杂轮廓。它具有先进的可变光束源,能够精确控制离子能量和剂量。离子源装有高精度磁场发生器,用于精确的光束偏转。AMAT xR80 Leap II离子监测器具有先进的校准设备,该设备使用实时反馈来确保细粒度的数据质量,并具有自动安全检查功能,以确保在整个晶片上均匀植入。它使用了Adaptive OpticsPlatform(AOP)实时测量和调整剂量,以及多通道光电探测器阵列来收集详细的位置信息。AMAT xR80还具有智能光束对准系统(SBAS),该系统无需人工干预并允许将离子高保真放置到晶圆中。SBAS还确保在一定角度和距离范围内精确设定和保持剂量。由于其强大的设计和传感器监控装置,该xR80的故障率非常低。它还能够将晶片加热到绝对零的10˚C内,确保离子无论环境条件如何都保持原位。在安全性方面,APPLIED MATERIALS xR80 Leap II配备了安全联锁装置,并已获得USDOT(美国运输部)合规性认证。外壳涂有抗静电抑制剂,使其符合最新的CE标准。它还具有安全登录功能,只允许授权人员在附近。XR80 Leap II是一种多合一离子植入器和监控器,旨在帮助用户在半导体晶片中实现干净、均匀的掺杂。它具有先进的光束可调性、实时数据质量控制机器以及多种安全特性,是任何实验室或制造环境的绝佳选择。
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