二手 ACCRETECH / TSK AD-2000T #9187561 待售

Dicing saw, 12" Frames and cassettes: 12" Infineon frame C66365-A0034-C068-03-0006 12" Infineon frame C66365-A0034-C068-03-0006 12" ePAK Resources EFF12-300-3,5-EM-59 12" Disco frame DTF2-12-1 12" Frame magazine metal (Infineon standard) Accuracy: Kerf off-center: < 5 µm (6σ) Kerf off-center Y1 to Y2 axis: < 3 µm (6σ) Z-Axis repeatability: < ± 1µm (6σ) Non contact set-up repeatability: < σ 2 µm (6σ) Difference between chuck set-up and non-contact set-up: Max 4 µm (6σ) Y-Movement (Y-axis for 1st and 2nd spindle): Closed loop system Effective stroke of each axis: min 310 mm Indexing setting range: 0,0001 (0,1µm) to 310 mm for Y-axis and for y-axis. Cumulative indexing error: < 3µm (6σ) at full range of 310mm (Y1-axis) Single indexing error: < 2µm (6σ) at full range of 5mm X-Movement: Effective cutting stroke: 310mm Stroke setting range: 1" - 12" Programmable cutting speed: 0,1 to 300mm/s Back movement speed 1000mm/s X-Axis straightness: < 3 µm (6σ) /310 mm Perpenticularity between X-axis and spindle shaft: < 8 arc sec (6σ) (1 arc sec = σ / 180 x 3600) Perpenticularity between X- and Y- axis: < 10 arc sec (6σ) Z-Movement: Minimum step: 1 µm (6σ) Effective stroke: > 14 mm (2" Blade) Z-Axis speed: 50.0 mm/sec Z-Axis repeatability: σ 1 µm (6σ) Theta-movement: Rotation angle: 0° - 320° CW and 60°CCW from initial point Rotation speed: 45°/sec Repeatability: ± 2 arc sec (6σ) Closed loop system Spindle: Temperature stable spindle Output: 1800W Rotation speed: Up to 60.000 rpm Dynamic vibration measured on any point of the spindle: Up to 55.000 rpm: < 0.5 µm Blade connection: ¾" Si-wafer cleaning system: Atomizing nozzle at cleaner (N2/DI water) Rotation range: 100 to 3000 rpm (Programmable) Time setting: 1 - 999 sec (Programmable) Stop position accuracy: ±1° Voltage: 210 VAC ± 6% 3 Phase 50 Hz ± 1% Compressed air pressure: 0,5 to 0,8 MPa 350 NL/min N2: 0,5 to 0,8 MPa 200N L/min Wheel coolant / Spinner cleaning water / Water curtain: 0,2 to 0,4 MPa 14 L/min Spindle coolant: 0,2 to 0,4 MPa 3,0 L/min Rinsing water: 0,2 to 0,4 MPa 1,0 L/min Duct capacity >5 m3/min.