用過的 KOKUSAI VERTRON III 出售

ID#: 135994 製造商: KOKUSAI 模型: VERTRON III 類別: DIFFUSION FURNACES & ACCESSORIES 釀酒: 1999 晶圓尺寸: 8" 设备详细信息: Vertical diffusion furnace / LPCVD / Poly CVD furnace, 8" Process applications: Dry-Ox, Wet-Ox, NO(N2O)-Anneal, Well Diffusion, N2(Ar, H2)-Anneal, PH3-Anneal, Doped/Undoped-Poly-Si, Doped/Undoped-SiGe-Poly, Si3N4, TEOS, HTO Accommodates: 5 wafers simultaneously Automatic filler dummy wafer supply by wafer detection mechanism SEMI standard compliant I/O stage Supports SMIF interface GUI tube controller (CX3000 series) SECS / GEM compatibility 1999 vintage.
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