二手 TEL / TOKYO ELECTRON Alpha 8SE #144024 待售
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ID: 144024
TiN Furnace, 8"
System configuration:
(Qty.)System Hand LL
System Paint Color White
Furnace Front Surface Finish Painted
Process Pressure 500 mTorr
Process Temperature ( C ) 800C
FTP Heater Installed
Rapid Cooling Unit Installed
Heater Type FTP VOS-40-017 (RT)-1000C
N2 Purge System Installed
02 Densimeter Model NGK SH-302
SMIF Not Installed
SMIF POD (maker/model) N/A
SMIF OEM Probe (maker/model) N/A
AGV Compatibility Not Installed
Process Gasses
Process Gas 1 Pure N2
Process Gas 2 NH3
Process Gas 3 H2
Process Gas 4 ClF3
Process Gas 5 TiCl4
Gas Distribution System
Basic Style Integrated Gas System Rail Type (Fujikin)
Tubing Material Stainless Steel
Tubing Finish Electro-polish
Manual Valve FUJIKIN
Air-Operated Valve FUJIKIN
Filter Millipore
Regulator Veriflo
MFC STEC SEC-7350 (Analog)
Press. Transducer Veriflo
Press. Transducer Display Reference Compound
External Torch Unit N/A
Baking System - Burn Out Unit Not Installed
Vaporizer N/A
Liquid Source Auto-Refill N/A
Auto-Refill Provided By N/A
Auto-Refill Tubing Interconnect By N/A
Auto-Refill Power Provided By N/A
Gas System Schem. Dwg/Parts List 2109-323548-13
Panel Heater for Furnace Opening N/A
Vacuum System:
Vacuum Pressure Controller CKD-VEC
Trap Not Installed
Pump-FNC Vac Tubing Provided By Customer
Manifold Heater Not Installed
Water/Cassette Handling
Wafer Type 200mm SEMI STD - Notched
Wafer Notch/Flat Aligner Installed
Cassette Type
Cassette-Number of Wafers 25
Cassette Storage Qty. 21
Monitor Cassette Operation
Cassette In-Out Sequence
Transfer-stage Protrusion Sensor Installed
Fork Type/Material 1+4
For-Wafer Presence Sensor Installed
Fork-Wafer Position Sensor or Guide Not Installed
Fork-Variable Pitch Installed
Boat/Pedestal
Boat Rotation Installed
Cap Heater Installed
System Controls
System Controller WAVES
Remote MMI and Gas Flowchart Not Installed
Signal Tower/Colors Red/Yellow/Green
Signal Tower Location(s)) FNC Front
General Pressure Display Units PSI
Cabinet Exhaust Display Units Pa
Temperature Control
Furnace Temperature Controller M-560A
Gas Leak Detection
Gas Detection Provided By TEL
Gas Detection System Maker Riken
Gas 1 Detected/Point H2 U/Box
Gas 2 Detected/Point NH3 U/Box
Gas 3 Detected/Point ClF3 U/Box
Customer I/F Ctrl. Handshakes
Other Options and Specials Not Installed
Bar Code Reader (maker/model Not Installed
Other Options and Specials
Bar Code Reader (maker/model Not Installed
Chemical Pre-filter Not Installed
Rapid Ionizer (maker/model) Not Installed
Equipment Layout & Facilities
Furnace Exhaust Connection Point Top Connection
Cooling Water Connection Point Bottom Connection
Incoming Gas Connection Point Top Connection
Gas Unit Exh. Connection Point Top Connection
Facility Elect. - Equip. Per Input
Voltage 3phase 480V
Voltage1phase 120V
Ctrl Pwr UPS make/model No UPS
UPS Input Voltage/Output Voltage N/A
Step Down Transformer (Outside) 480V In 100V/200V Out
2003 vintage.
TEL/TOKYO ELECTRON ALPHA 8SE是一种扩散炉及附件,用于半导体基板的精确热处理。特别用于源/排水开发和退火目的。该炉采用TEL先进的直线型高效加热工艺,可实现精确的温度控制,具有良好的均匀性和温度响应。TEL ALPHA-8SE扩散炉配备了高质量的多渠道输送系统,多基板装载能力大。该工艺室能够同时进行标准大气和真空处理,以及通过可选的原位气体喷射器进行大气控制。TOKYO ELECTRON ALPHA-8 SE的高温范围允许广泛的工艺要求,双区设计允许精确控制温度和大气优化。ALPHA 8 S E还附带先进的数字控制系统,对过程参数,如温度、压力和紧急停止设置给予精确可靠的控制。此外,Auto-Observe feature as standard允许用户在过程中监视过程参数并进行原位调整,以优化均匀性。流程监视器还捕获可用于统计流程控制(SPC)和分析的历史流程数据。此外,TEL Alpha 8SE还配备了标准的安全功能,包括物理和电子功能。安全联锁使操作员无法进入炉子和转移系统,并在出现异常情况时提供紧急停止。其他防护设备包括空气过滤系统,使加工室不受加压,以及耐热橡胶涂层,为室门提供隔热。总体而言,TEL/TOKYO ELECTRON ALPHA 8S-E扩散炉及其配件是先进热工艺的绝佳选择。它提供了广泛的功能,从基本过程标准化到完全自动化,并确保安全和过程可靠性。先进的一揽子解决方桉有助于提高流程一致性,同时数字控制系统简化数据采集和分析。所有这些特性和优点使TOKYO ELECTRON ALPHA 8S-E成为一种功能强大、用途广泛且可靠的工具。
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