用過的 TEL / TOKYO ELECTRON ALPHA 8SE 出售

This TEL / TOKYO ELECTRON ALPHA 8SE has been sold.

Check our Similar Products below, use our Search feature to find more products available for sale or contact us with any questions you might have.
ID#: 144024 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8SE 類別: DIFFUSION FURNACES & ACCESSORIES 设备详细信息: TiN Furnace, 8" System configuration: (Qty.)System Hand LL System Paint Color White Furnace Front Surface Finish Painted Process Pressure 500 mTorr Process Temperature ( C ) 800C FTP Heater Installed Rapid Cooling Unit Installed Heater Type FTP VOS-40-017 (RT)-1000C N2 Purge System Installed 02 Densimeter Model NGK SH-302 SMIF Not Installed SMIF POD (maker/model) N/A SMIF OEM Probe (maker/model) N/A AGV Compatibility Not Installed Process Gasses Process Gas 1 Pure N2 Process Gas 2 NH3 Process Gas 3 H2 Process Gas 4 ClF3 Process Gas 5 TiCl4 Gas Distribution System Basic Style Integrated Gas System Rail Type (Fujikin) Tubing Material Stainless Steel Tubing Finish Electro-polish Manual Valve FUJIKIN Air-Operated Valve FUJIKIN Filter Millipore Regulator Veriflo MFC STEC SEC-7350 (Analog) Press. Transducer Veriflo Press. Transducer Display Reference Compound External Torch Unit N/A Baking System - Burn Out Unit Not Installed Vaporizer N/A Liquid Source Auto-Refill N/A Auto-Refill Provided By N/A Auto-Refill Tubing Interconnect By N/A Auto-Refill Power Provided By N/A Gas System Schem. Dwg/Parts List 2109-323548-13 Panel Heater for Furnace Opening N/A Vacuum System: Vacuum Pressure Controller CKD-VEC Trap Not Installed Pump-FNC Vac Tubing Provided By Customer Manifold Heater Not Installed Water/Cassette Handling Wafer Type 200mm SEMI STD - Notched Wafer Notch/Flat Aligner Installed Cassette Type Cassette-Number of Wafers 25 Cassette Storage Qty. 21 Monitor Cassette Operation Cassette In-Out Sequence Transfer-stage Protrusion Sensor Installed Fork Type/Material 1+4 For-Wafer Presence Sensor Installed Fork-Wafer Position Sensor or Guide Not Installed Fork-Variable Pitch Installed Boat/Pedestal Boat Rotation Installed Cap Heater Installed System Controls System Controller WAVES Remote MMI and Gas Flowchart Not Installed Signal Tower/Colors Red/Yellow/Green Signal Tower Location(s)) FNC Front General Pressure Display Units PSI Cabinet Exhaust Display Units Pa Temperature Control Furnace Temperature Controller M-560A Gas Leak Detection Gas Detection Provided By TEL Gas Detection System Maker Riken Gas 1 Detected/Point H2 U/Box Gas 2 Detected/Point NH3 U/Box Gas 3 Detected/Point ClF3 U/Box Customer I/F Ctrl. Handshakes Other Options and Specials Not Installed Bar Code Reader (maker/model Not Installed Other Options and Specials Bar Code Reader (maker/model Not Installed Chemical Pre-filter Not Installed Rapid Ionizer (maker/model) Not Installed Equipment Layout & Facilities Furnace Exhaust Connection Point Top Connection Cooling Water Connection Point Bottom Connection Incoming Gas Connection Point Top Connection Gas Unit Exh. Connection Point Top Connection Facility Elect. - Equip. Per Input Voltage 3phase 480V Voltage1phase 120V Ctrl Pwr UPS make/model No UPS UPS Input Voltage/Output Voltage N/A Step Down Transformer (Outside) 480V In 100V/200V Out 2003 vintage.
[+] 閱讀更多 [-] 關
價錢

感謝您提交信息。 我們將盡快與您聯繫,了解您的設備。

loading

發送消息...

請輸入您的聯繫信息,CAE的銷售團隊成員將與您聯繫,討論設備。

* 必填项目