二手 TEL / TOKYO ELECTRON Alpha 8SE #182012 待售

TEOS furnace, L-type Medium temperature General Configuration: Safety Specification: TEL Standard System Layout Type: 200mm configuration System Paint Color: Biege white Furnace Front Surface Finish: Painted / SS Process Pressure (Torr): N/A Process Temperature (ºC): 1000 (Max) FTP Heater: Not Installed Rapid Cooling Unit: Not Installed Heater Type: Mid Temp VMM-40-101 Process Gasses: Process Gas 1: N2 - Process Gas 2: O2 - Process Gas 3: ClF3 Process Gas 4: TEOS Cleaning Gas 1: SETC-TEOS 200cc Cleaning Gas 2: N/A Gas Distribution System: Basic Style: Integrated Gas System (Fujikin) Tubing Material: Stainless Steel Tubing Finish: Electro-polished Tubing Bends: Mechanical Bends OK Manual Valve: Fujikin Air-Operated Valve: Fujikin Filter: Millipore Regulator: Fujikin MFC: AERA Press. Transducer: MKS/NAGANO KEIKI Press. Transducer Display Reference: Compound External Torch Unit: Std Flow Torch Vaporizor: N/A Liquid Source Auto-Refill: N/A Auto-Refill Provided By: N/A Auto-Refill Tubing Interconnect By: N/A Auto-Refill Power Provided By: N/A Gas System Schem. Dwg / Parts List: TEL Supplied Panel Heater for Furnace Opening: N/A Wafer/Cassette Handling: Wafer Type: 200mm SEMI STD Notch Wafer Notch / Flat Aligner: Installed Cassette Type: Fluoroware KA200-80MHR Cassette -Number of Wafers: 26 Cassette Storage Qty.: 21 or 16 Monitor Cassette Operation: IN In-batch/OUT In-batch Cassette In-Out Sequence: In -P1,P2,..,M / Out -P1,P2,..,M Transfer-stage Protrusion Sensor: Installed Fork Type/Material: 1+4 / Al203 Fork -Wafer Presence Sensor: Installed Fork -Wafer Position Sensor or Guide: Installed (Position Sensor) Fork -Variable Pitch: Installed Wafer Loading/Unloading Sequence: ED-->P-->M / M-->P-->ED System Controls: System Controller: Waves Remote MMI and Gas Flowchart: FPD & GFC Installed Signal Tower / Colors: Installed / 4-Color Signal Tower Location(s): (Furnace Front) Temperature Control: Furnace Temperature Controller: M560A Facility Elect. -Equip. Pwr Input( 2 line): Voltage 3phase: 208VAC, 125A, 50Hz Voltage 1phase: 100VAC, 50A, 50 Hz.