二手 TEL / TOKYO ELECTRON Alpha 8SE #9159786 待售

Nitride furnace, 8" Gas configuration: Mass flow control Back: N2 N2 20 SLM Mass flow control N2-1: N2 10 SLM Mass flow control N2-2: N2 10 SLM Mass flow control SiH2Cl2-1: SiH2Cl2 200 SCCM Mass flow control SiH2Cl2-2: SiH2Cl2 1 SLM Mass flow control NH3-1: NH3 2 SLM Mass flow control NH3-2: NH3 200 SCCM Vacuum configuration: Main vacuum: CKD Valve Slow vacuum: SV Vacuum line Small slow vacuum line: SSV Vacuum line Vacuum gauge1: 631C11TBFH(Hot type) Vacuum gauge2: 631C13TBFH(Hot type) Vacuum gauge3: 626A12TBE Electrical power: Main power(Heater power): 3-ph 400V 50/60Hz Control power: 1-ph 230V 50/60Hz Leveling: Detail description Spec Check methods Data Result Scratch No scratch Eye checking No scratch OK Safety label Attached Eye checking Attached OK Gas label Attached Eye checking Attached OK Gas flow chart Attached Eye checking Attached OK Hardware setting: Detail description Spec Check methods Data Result Exhaust box - Main body signal cabling N.A Eye checking N.A - Power box - Main body signal cabling N.A Eye checking N.A - Exhaust box - Main body gas line ass'y N.A Eye checking N.A - Utility box - Main body signal cabling Good condition Eye checking Yes OK Utility box - Main body gas line ass'y Good condition Eye checking Yes OK Utility box - Main body vacuum line ass'y Good condition Eye checking Yes OK Utility Box - Main body PCW Line ass'y Good condition Eye checking Yes OK Pump Box - Utility box signal cabling N.A Eye checking N.A - Power Box - Utility box signal cabling N.A Eye checking N.A - TLC Unit ass'y N.A Eye checking N.A - Burning unit ass'y N.A Eye checking N.A - Primary power turn on: Detail description Spec Check methods Data Result Control power input 208 V ±10% DVM 208 V ±10 OK Clean unit power input N.A DVM N.A - Primary utility turn on: Detail description Spec Check methods Data Result Air/N2 turn on 3.5 kgf/㎠ ↑ Gauge 3.8 kgf/㎠ OK Vacuum turn on N.A Eye checking N.A - N2 Gas turn on N.A Gauge N.A - Heater bake: Detail description Spec Check methods Data Result Heater model VMM - 40 - 101 Heater power turn on 400V ±10% DVM 400V ±10% OK Heater BTM recovering instruction N.A Eye checking N/A - Temp control data confirm(U) S/V : 500oC 500C ±5% Display 499.9C OK Temp control data confirm(CU) S/V : 500C 500C ±5% Display 499.9C OK Temp control data confirm(C) S/V : 500C 500C ±5% Display 500.0C OK Temp control data confirm(CL) S/V : 500C 500C ±5% Display 500.0C OK Temp control data confirm(L) S/V : 500C 500C ±5% Display 499.7C OK Loader system initial: Detail description Spec Check methods Data Result Wafer transfer forward / backward No error Eye checking No error OK Wafer transfer rotation No error Eye checking No error OK Wafer transfer up / down No error Eye checking No error OK Boat elevator up / down No error Eye checking No error OK Wafer transfer fork pitch move No error Eye checking No error OK Cassette loader forward / back ward No error Eye checking No error OK Cassette loader left / right No error Eye checking No error OK Cassette loader up / down No error Eye checking No error OK Shutter open / close No error Eye checking No error OK Boat elevator rotation No error Eye checking No error OK All Initial ( Add air cylinder axis ) No error Eye checking No error OK Gas line pressurization Leak check: Detail description Spec Check methods Data Result N2 Gas line leak check result(12H) 2.0 ㎏f/㎠ ↑ Gauge(before) Yes OK Δ0.05 ㎏f/㎠ ↓ Gauge(after) Yes OK Leak check result(12H) gas name : DCS 2.0 ㎏f/㎠ ↑ Gauge(before) Yes OK Δ0.05 ㎏f/㎠ ↓ Gauge(after) Yes OK Leak check result(12H) gas name : NH3 2.0 ㎏f/㎠ ↑ Gauge(before) Yes OK Δ0.05 ㎏f/㎠ ↓ Gauge(after) Yes OK Leak check result(12H) gas name : 2.0 ㎏f/㎠ ↑ Gauge(before) N.A - Δ0.05 ㎏f/㎠ ↓ Gauge(after) N.A - Tool inner, outer clean: Detail description Spec Check methods Data Result Gas box clean Cleaned Eye checking Cleaned OK Exhaust box clean N.A Eye checking N.A - Heater room clean Cleaned Eye checking Cleaned OK Wafer transfer room clean Cleaned Eye checking Cleaned OK I/O stage clean Cleaned Eye checking Cleaned OK Cassette loader room clean Cleaned Eye checking Cleaned OK Carrier stage clean Cleaned Eye checking Cleaned OK Corrosion No corrosion Eye checking No corrosion OK Chamber ass'y: Detail description Spec Check methods Data Result Heater inner section Status confirm Good condition Eye checking Yes OK Liner Tube ass'y status confirm N.A Eye checking N.A - Outer Tube ass'y status confirm Good condition Eye checking Yes OK Process Tube ass'y status confirm N.A Eye checking N.A - Inner tube ass'y status confirm Good condition Eye checking Yes OK Reactor-1 gas name : DCS Good condition Gas name Yes OK Reactor-2 gas name : NH3 Good condition Gas name Yes OK Reactor-3 gas name N.A Gas name N.A - Reactor-4 gas name N.A Gas name N.A - Reactor-1 nozzle Good condition Nozzle shape Yes OK Reactor-2 nozzle Good condition Nozzle shape Yes OK Reactor-3 nozzle N.A Nozzle shape N.A - Reactor-4 nozzle N.A Nozzle shape N.A - Exhaust nozzle ass'y N.A Eye checking N.A - Burning tube ass'y N.A Eye checking N.A - Boat cap setting(Fixed status confirm ) Good condition Eye checking Yes OK Boat setting(Fixed status confirm ) Good condition Eye checking No check - Loader check: Detail description Spec Check methods Data Result Boat elevator Up / Down(Touch section confirm) No error Eye checking No error OK Wafer Transfer Up / Down(Touch section confirm) No error Eye checking No error OK Wafer transfer forward / backward moving (Vibration & noise confirm) No error Eye checking No error OK Wafer transfer rotation moving (Vibration & noise confirm) No error Eye checking No error OK Wafer transfer moving (Vibration & noise confirm) No error Eye checking No error OK Boat elevator moving (Vibration & noise confirm) No error Eye checking No error OK Cassette loader forward / backward moving (Vibration & noise confirm) No error Eye checking No error OK Cassette loader moving (Vibration & noise confirm) No error Eye checking No error OK Cassette loader up / down moving (Vibration & noise confirm) No error Eye checking No error OK I/O stage vertical / horizontal moving (Vibration & noise confirm) No error Eye checking No error OK Boat elevator rotation (Vibration & noise confirm) No error Eye checking No error OK I/O Stage lock / unlock Moving (Vibration & noise confirm) No error Eye checking No error OK Auto furnace rolling Shutter operation confirm (Vibration & noise confirm) No error Eye checking No error OK Wafer transfer teaching No error Eye checking No check - Boat elevator teaching No error Eye checking No check - Cassette loading test 3 times No error Eye checking No check - Wafer loading test 10 times No error Eye checking No check - Quartz: Detail description Spec Check methods Data Result Check that all parts are assembled together Well Installed Assemble checking Well Installed OK Temperature control: Detail description Spec Check methods Data Temperature controller Model 560Z(5 Zone control) Model 560Z(5 Zone control) OK SCR Unit Middle temperature 5 Zone Middle temperature 5 Zone OK Thermocouple Middle temperature 5 Zone Middle temperature 5 Zone OK Jucntion box 5 zone temperature control 5 zone temperature control OK Heater chamber VMM-40-101 VMM-40-101 OK Excess control 5 zone temperature read 5 zone temperature read OK Missing parts.