二手 TEL / TOKYO ELECTRON Alpha 8SE #93399 待售

Nitride LPCVD furnace, 8" 170 wafer slots Tool Specific Information: Heater Part No: VMM-40-101 Software Version: Ver3.11 R005 WAVE System Power Rating: 110AC One Phase / 208 AC Loading Configuration: 6 Loader Main System: WAVES Controller Photohelic Gauge Boat Elevator Wafer Load Automation 21 Cassette Stocker Temperature Controller (M560) Furnace Monitor, Power Control Unit Remote Utility&Gas Cabinet Inner T/C for Ration Mix Auto Shutter Gas System (NH3, DCS) Options: Signal Tower Pitch Change Mechanism UPS GEM Communication N2 Load Lock Ambient Control: Quartz ware Load size 170 wafers Load lock purge system Process gas: NH3, DCS Gas Type - Convention Gas System Tubing material - Stainless steel Tubing Finish - Electro-polish Manual valve - FUJIKIN Fitting Type - VCR/UJR Air-Operated valve - FUJIKIN Filter - MILLIPORE Regulator - VERIFLO MFC - AERA Pressure transducer - MILLIPORE or NAGANO Remote Components: Utility Box Power Rating: 110/208AC Pump Power Rating: 208AC-3 (Not Included) UPS Power Rating: 110AC-1 MFCs Summary MFC_NB (N2) 10sLm MFC_NR (Pure-N2) 50sccm MFC_NX (Pure-N2) 20sLm MFC_NY1 (Pure-N2) 200sccm MFC_NY2 (Pure-N2) 200sccm MFC_N1 (Pure-N2) 5sLm MFC_N2 (Pure-N2) 5sLm MFC_M1 (NH3) 2sLm MFC_D1 (SiH2Cl2) 200sccm MFM_M1 (Pure-N2) 2sLm MFM_D1 (Pure-N2) 200sccm Packing List: Power-Box UPS Main-Body Gas-Box Heater O2 Analyzer Vacuum Exhaust Pipe Cables Top Heater Frame Filter Fan Gas-Box Door EXT IN Unit Gas-Box Exhaust Support Backend Pipings Scavenger Flexible Duct Accessories 2 white boxes + 1 wafer container N2-LL Pipings Tray (Qty 3) Cable Trays Loading Area Cover Backend Support/ Cover (Qty 5) Heater Panels Main-Valve Crated in a warehouse 2004 vintage.