二手 TEL / TOKYO ELECTRON TELINDY B #9014197 待售

看起来这件物品已经卖了。检查下面的类似产品或与我们联系,我们经验丰富的团队将为您找到它。

ID: 9014197
晶圆大小: 12"
Vertical diffusion furnaces, 12" Base unit for DCS HTO process Includes: Cabinets / units / controllers included Furnace cabinet (including ultra-clean air flow system) Scavenger and water cooling unit Power supply unit (U/P box) (Includes control unit, transformers, SCR, and breaker unit) Main controller (WAVES) Temperature controller FOUP and wafer handling automation included FOUP load port FOUP transfer 18 FOUP stocker FIMS port KHI wafer load automation Variable pitch change mechanism (w/5 fork) Auto tube shutter Boat elevator w/ boat rotation mechanism Mid temp heater: VMM-56-002 1 Included Includes outer/inner T/C Integrated gas system for DCS HTO 1 Included N2O gas stick 1 stick Included DSC gas stick 1 stick Included Purge N2 Vacuum vent Exhaust vent Piping tape heater PAC (Pre Activation Chamber) Vacuum foreline configurations Stainless steel manifold 80A foreline piping Foreline heater APC main valve Vacuum gauge & pressure switch US safety (S2-0302, S8-0999) Quartzware set for DCS HTO 1 Included (Including x2 of 75 slots Ladder Boat) System options: N2 Load lock option 1 Included - O2 analyzer - NGK SH-302 - O2 consumption rate controller Dual boat operation 1 Included N2 boat cooling shower 1 Included Fixture for start up and maintenance 1 Included Final valve unit 1 Included NH3 coating capability                            Hi-temp capacity (<850°C)                          2007 vintage.
TEL/TOKYO ELECTRON TELINDY B是蚀刻器的一种,又称asher。它是一种半导体和光伏器件制造设备,包括真空系统、工艺源单元和工艺单元。它采用电子束技术和专用软件机器来控制蚀刻过程的均匀性和准确性。蚀刻器依赖于其工具的三个主要组成部分-真空资产、工艺源模型和工艺单元。真空设备从腔室抽出空气和气体,其中心是涡轮分子泵。另一方面,过程源系统在供应等离子源气体方面起着关键作用,这些气体通过质量流控制器、压力控制器和多气体穿孔管的集成网络进入。最后,工艺单元通过控制所施加的气体压力、流速、功率和设备的定时,在室内传递蚀刻过程。由于电子束蒸发器的作用,TEL TELINDY B蚀刻器可以在蚀刻过程中提供高精度和控制。该梁用于控制薄膜源在厚度控制上的蒸发,还具有选择性涂覆板的能力。蚀刻器还允许通过使用晶圆CD(临界尺寸)测量机布置许多用于蚀刻的工艺层。TOKYO ELECTRON TELINDY B蚀刻器还具有出色的温度控制能力,可以帮助调节不同底物之间的均匀性。这种蚀刻器的另外一个好处是,操作员有能力利用腔室压力、冷却气体压力和气体流速等工艺参数,以便根据他们的需要量身定制蚀刻工艺。最后,蚀刻器非常先进,因为它配备了直观的软件工具,使操作员能够优化蚀刻过程并自动执行许多任务。这使得操作员更容易调整不同的工艺参数,并确保蚀刻工艺的结果是一致和准确的。总体而言,TELINDY B是一种高度先进的蚀刻器,具有电子束蒸发器,以确保精确度和对蚀刻过程的控制。操作员可以利用过程参数来根据自己的需要定制蚀刻过程,而直观的软件资产可确保某些任务的易用性和自动化。
还没有评论