二手 TEL / TOKYO ELECTRON Telius SP 305 SCCM #9074890 待售

Dielectric etcher, 12" Standard Specifications Software Revision: Linux 5.75 Rev 001 Lot Stability Dummy SW: Software for running lot stability wafer OEE WPH Software: Yes GEM SEC Revision: TBD Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch Carrier: FOUP (Comply with SEMI E47.1 (25wafers)) Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx) Interface A: Yes Utility Box: Regulator: Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO) Utility Box: Manual Valv: OGD20V-6RM-K / OGD10V-4RM-K (CKD) Utility Box: Pressure Gauge: Bourdon Gauge Loader Mod Corrosion Prevent: NO, without Corrosion Prevent Load Lock Pressure Monitor: Pressure Switch: VSA100A (INFICON) Load Lock Pressure Monitor: Pirani gauge: TTR211S LEYBOLD) Load Lock Pressure Monitor: CM: 626A01TDE (MKS) Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type) Water Leak Detector: 5 (LM;1, each PS;1) Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1) Data Back up: USB& MO EMO: Front x3, Rear x6 Cable Length: One 15m and one 16m (Interconnection, RF cables) Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed) Fittings: No brass fittings Supporting Remote Units Chiller: UBRPD5A-2T　 Coolant: Lower:FC3283, Upper:FC40 Chiller Hose: BRINE HOSE 15/14M Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A RF Generator TOP: AGA-50B2 RF Matcher TOP: AMN-50B2 RF Generator Bottom: WGA-50E Matching Controller: WMN-50H6(2MHZ/5KW)(PS3) Pen Record Box: 2L80-00212-12 Loader Module: SELME2112ZS22-AD5 LOAD PORT: NO, Bolts-L type DRIVE UNIT: SBX92102928 READER OPTICAL: ISS-1700-1TELCC Carrier ID Reader: NO,V640series+V700-L22 (Omron) APC: 12" (320MM) Hardware Configuration Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating Chamber hardware: FCC Endpoint type: SE2000ii ESC type: Ceramics ESCwith STD Vpp Focus ring: 3.4mm Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins Polished focus ring: O FC lower insulator: FC lower insulator w/quartz upper ring shield Magnet Shield: O Oring for Chbr Body-Depos: Armorcrystal, Chemraz SC657 CEL Body ASSY: Brine Control Mode TMP: TMP-3403LMC-T4(VG300) (SHIMADZU) TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Dry Pump: ESR80WN, KEG approved Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD) Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic) APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90deg Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa Pressure Monitor: N,41A13DGA2AA040 (MKS), no process impact Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Gas Box Configuration: Gas line 1- N2 1000 sccm-AERA FCD985CT-BF Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF Gas line 4- O2 50 sccm-AERA FC-D985CT-BF Gas line 5- CH2F2 30 sccm-AERA FC-D985CT-BF Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF Gas line 9- C3F8 50 sccms-AERA FC-D985CT-BF Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF Purge: N2 (Process Grade N2) Filter: CNF1004USG4 (Nihon Pall) Regulator: SQMICRO (VERIFLO) Filter (N2): CNF1004USG4 (Nihon Pall) Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN) Valve: Secondary side(MFC-PC):Mega one (FUJIKIN) Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box) Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type) Final Pressure Switch: 51A (MKS) Pressure Gauge: Bourdon Gauge (with inside finishing) Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa SP3 Gas Line Connection: No GBROR: GBROR Process Kit Configuration: WINDOW, SHIELD DEPO (DRM2) QUARTZ (ES1D05-400022-14) WINDOW DEPO SAF0.5(DRM2) SAPPHIRE (ES1D10-406499-11) SHIELD, UPPER 300MM RING – Quartz (ES3D05-250025-11) Insulator, ESC Enclosure (COC) – Quartz (ES3D05-300142-13) Cover Ring, 360- L (M) – Quartz (ES3D05-300243-11) RING, BTM SHIELD Y-AL, SE (ES3D10-100844-11) PLATE,EXHAUST Y-AL, SE (ES3D10-100845-11) SHUTTER, BTM TYPE Y-AL, SE (ES3D10-101152-13) SHIELD,DEPO (ES3D10-101195-11) Focus Rg, 360-302-COC (ES3D10-201448-13) Insulator, lower T32-BI-NC (ES3D10-202405-13) WINDOW,DEPO CLP/Y2O3-100P(N) (ES3D10-350344-12) SCREW PIN LOCK, Cerazol: Ceramic (ES3D10-404011-11) Si Upper Electrode (ES3D10-253020-11) CEL ASSY (ES3D87-052656-11) ESC ASSY (with ceramic pusher pins) (ES3D87-002056-13) Damage/Missing Parts: Non reported, please reconfirm at tool inspection Currently installed.