二手 VEECO Gen II #9173265 待售

製造商
VEECO
模型
Gen II
ID: 9173265
MBE Growth system Chamber with (8) source flange size 4.5” Sources: Al, Ga, In, Be, Si, GaTe, As, Sb (2) Ion pumps: Main chamber (600 l/m) Preparation chamber (400 l/m) with (2) power supplies CTI8 Cryo pump for main chamber 6” Turbo pump with dry pump for load lock (2) Ti-Sublimation pumps With power supplies in base of main chamber Sample manipulator with servo motors for rotation, 2" or 3" Position setting Control unit Beam flux monitor Controller Sample manipulator heater with power supply Temperature controller and display (3) Ion gauges: With (3) power supplies and controllers Main chamber Preparation chamber Load lock Load lock for 4-10 wafers With heater for pre-bake out at 150°C, power supply included Temperature controller Preparation chamber With heater for bake out at 400°C, power supply included Temperature controller Electrical distribution panel Bake out panels with electrical connections (8) Shutters with their control units Utility distribution box for water, air, N2 QMS and RHEED with power supplies Operating system and computer (Latest version of Moly, or AMBER, or EPIMAX) 4-6 Sample holders Silver coated copper gaskets Pyrometer RHEED Camera and analysis software Turn key project Effusion cell: Flange, 4.5" Dual or single heater up to 1350 C 85-155 CC PBN crucible Power supply Temperature controller.
VARIAN/VEECO GEN II是一种分子束外延(MBE)设备,可用于生长包括III-V多型、氧化物、氮化物、石墨烯和稀土元素在内的多种材料。该系统由两个主要组成部分组成,包括一个两室MBE单元以及对工具和仪器的全面补充。两室MBE机由蒸发室和生长室组成。蒸发室有六个Knudsen细胞源,允许材料类型的变化。生长室是一个高度可定制的浴管为基础的腔室,旨在最大限度地实现外延生长。该工具配备了大量的子系统,所有这些子系统都旨在优化材料质量,包括温度控制、基板加热和六轴原位监测。控制资产允许自动化的增长过程以及远程控制。此外,该模型还配备了一系列可选参数,包括源几何形状的定制、狭缝刀片和栅格、样品吞吐量和腔室压力控制,以及预对准和后对准功能,以提高材料质量和准确性。最后,设备配备了多种不同的支撑系统,包括脱气集群、远程电子枪、激光系统以及允许用户绘制出电位的控制器组合,以进一步优化材料质量和增长速度。总而言之,VEECO GEN II是一个强大的单元,能够种植各种材料。其众多的辅助系统和参数,以及自动控制,允许对材料生长进行精确操作,以产生一致的高质量材料,然后可用于各种应用。
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