二手 HITACHI S-9300 #9032647 待售
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ID: 9032647
优质的: 2001
CD Scanning electron microscope, 8-12"
Electron optical system:
Electron gun: SCHOTTKY Emission source
Electro magnetic lens:
3-Stage electromagnetic lens system with boosting voltage
Objective lens: (4) Openings click stop
Heated aperture is selectable / Adjustable outside the vacuum
Scan coil:
2-Stage electromagnetic deflection
Astigmatism correction via an 8-pole electromagnetic coil
Magnification: 1000x to > 300000x
Field control method: Continuously on for sample discharging at all voltages
Wafer imaging ability; Entire surface of 8” (or 12”) wafer
Depth of focus: >= 1.0 um at 80000x magnification
Resolution: 3 nm (800V) Retarding / Boosting mode
Hitachi probe tip
Power: 208 V 60 Hz 6 kVA 1 Phase
CD Measurement principle: Cursor and line profile measurement
Optical microscope system:
Image is monochrome
CCD Camera
Magnification is 110x
Wafer imaging:
X Coverage from 5 – 295 mm
Y Coverage from 5 – 195 mm
Notch down
Field of view: 1.2 mm
Accelerating voltage: 500 V to 1600 V, 10 V steps
Probe current: 4~24pA
Workstation:
Model: HP B180L (9GB)
O/S: Unix version HP-UX 10.20
Software version: 14.71
SECS / GEM Communication interface
Dual XY HITACHI micro scale
DSP Image processing
BSE Mode functionality
Multipoint measurement function
Edge roughness function
Automated image archiving function
Wafer handling system: (2) Cassette holders / ergo flippers
Convertible to 300 mm with conversion kit BRK-287006300
Water chiller unit
Main unit:
HV Controller
Lens PS unit
DEF PS Unit
Laser receiver unit
X-Axis laser unit
Laser linear scale cover
X-Axis excel precision PCB
Y-Axis excel precision PCB
STSensor PCB (R)
STSensor PCB (R)
STSensor PCB (L)
Secondary electron detection: SE and BSE electrons
Aperture ass'y
Ion pump 1, Ion pump 2, Ion pump 3 & controller
TMP1, TMP2 & controller
Stage controller
Display Unit:
Display of SEM and OM images, GUI operation screen
HP Workstation (B180L)
Keyboard & Mouse
FDD
MO Disk drive
System controller
ECPU 263 Controller
C-820A Controller
4500 COGNEX Controller
NMEN Controller
SIP Controller
PSDISP Controller
NSGVA Controller
EOCONT Controller
NOMAFC Controller
STAGE EBSI100 Controller
WT EBSI100 Controller
EVAC EBSI100 Controller
HV EBSI100 Controller
AMHSIO Controller
Power unit:
NIP Board
PS CN PCB
UPS Unit
Main power switch unit
ION pump power supply unit
Power distribution unit
Transformer unit
Port 1:
Door case
EFEM Unit:
Robot ass'y
Ceramic arm
Prealigner
Includes:
Load port 1
Load port 2
WT Controller
Chiller
Option:
Dry pump
Missing parts:
Display unit:
SIP Board
Cognex 4500 board
LAN HUB unit
HDD
Currently de-installed
2001 vintage.
HITACHI S-9300是一种扫描电子显微镜(SEM),设计用于材料分析领域的高级应用。它提供了多种成像功能,包括高放大倍率、卓越的分辨率以及各种制作图像的方法。HITACHI S9300的电子柱能够以2.5nm的分辨率实现高达570,000 ×的天文放大倍数,从而可以深入了解传统光学显微镜无法到达的区域。因此,它能够以极高的清晰度对大小结构进行成像,非常适合进行微观分析。显微镜上装有六硼化的LaB6场发射枪(FEG)和以CS为中心的肖特基场发射枪(FE),但允许在更高放大倍率下有更高的性能。此外,它的多焦点设置允许用户在保持固定焦点的同时在任意两个放大倍数之间切换。SEM还拥有一整套探测器,包括二次电子探测器、场发射扫描电子探测器、能量色散X射线探测器、波长色散X射线探测器、单色X射线探测器和X射线荧光探测器。这种种类繁多的探测器使用户能够更容易地从他们正在检查的任何材料中获取数据。此外,SEM具有多种预编程成像模式,如反向散射电子成像(BSE)、加速电压对比度成像(AVM)、反射电子成像(REI)以及几种成像断层扫描模式。总体而言,S 9300能够以高放大倍数生成令人难以置信的详细材料图像,同时还具有多种探测器和成像模式。它的特点和功能使它成为任何希望调查材料内部运作情况的人的宝贵工具。
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