用過的 MRC 603 #166010 出售
This MRC 603 has been sold.
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ID#: 166010
Sputtering system
Control ranges:
Sputtering pressure: 3 min, 25 max millitorr
Scan speed: 2 min, 400 max cm/min
DC Sput: 300 min, 9999 max watts
RF Sput: 0.02 min, 2.5 max kV, 0.1 min, 1.5 max kW
RF Etch: 0.2 min, 1.5 max kV, 0.1 min, 1.5 max kW
Heat at etch station: 10 min, 18 max Amps
Vacuum loadlock:
Ultimate: 50 milliTorr
Pumpdown time: 50 milliTorr within 2 min.
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製造商:
MRC模型:
603设备详细信息:
