用過的 MRC 603 #166010 出售

This MRC 603 has been sold.

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ID#: 166010

製造商:

MRC

模型:

603

设备详细信息:

Sputtering system Control ranges: Sputtering pressure: 3 min, 25 max millitorr Scan speed: 2 min, 400 max cm/min DC Sput: 300 min, 9999 max watts RF Sput: 0.02 min, 2.5 max kV, 0.1 min, 1.5 max kW RF Etch: 0.2 min, 1.5 max kV, 0.1 min, 1.5 max kW Heat at etch station: 10 min, 18 max Amps Vacuum loadlock: Ultimate: 50 milliTorr Pumpdown time: 50 milliTorr within 2 min.
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