用過的 ULVAC Entron W-200T6 #9003925 出售

ID#: 9003925

製造商:

ULVAC

釀酒:

2005

晶圓尺寸:

8"

设备详细信息:

PVD Sputtering system, 8"
Chemical dry pre-clean chamber
Anneal chamber for chemical dry pre-clean chamber
Anneal chamber for post anneal
PVD-Ni (Ring-Ni) chamber
PVD-TiN chambers
PVD Co chambers

Includes:
Open cassette buffer station
(2) Spare shields chamber
Host communications (SECS/GEM)
S2 Safety

TiN Target
Co Target
Ni Target and backing plate
Dry pumps
Gas scrubber

Platform: NCH6000
Process specifications: CDT + Co, Ni silicide process
Front interface: Buffer station (4) ports open cassette type
Gas scrubber

Substrate size: 200 mm
Signal tower
Standard chambers layout and chamber

Platform: ENTRON NCH6000 Tandem core
With intermediate chamber isolation valve
Compatible with differential pressure transfer (FX has Ar line with needle valve)

(2) KEYTRAN4Z Vacuum robots
Double hand type with wafer pickup (A12O3)

Main pumps:
(2) SHIMADZU TMP403LM
(2) CRYO T6E RS10
(4) BOC EDWARDS Fore pumps

C30ZR Cryo compressor
(2) G-TRAN BMR2/M-13 Vacuum gauges
(2) G-TRAN BPR2/WPB-010-034 Pirani vacuum gauges
(2) Gas feed system: Gas piping for ventings (With filter)

Control system:
Operation unit: ULV100U-400 Model 17 liquid crystal display
Control system: MS-IVA

EDWARDS Dry pumps
Sputter source
Power supplies
Shielding
Targets
Manuals

2005 vintage.
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