二手 ULVAC SIV-500F #9269095 待售
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ID: 9269095
Sputtering system
UL/CH:
Vacuum chamber: AI Chamber
Accessories:
Door grip opening mechanism
(2) Carrier sensors
Door sensor
O-Ring
Isolation valve (Between vacuum and vacuum)
Transfer system:
Carrier transfer mechanism
Carrier 2-stage exchange system
Measurements system:
ULVAC SW-1 Pirani vacuum gauge
SMC ZSE80F-A2L-R-M Atmospheric pressure switch
Vacuum pumping system:
Rotary pump
ULVAC VLP-U3SW Roughing valve
SMC XLG-50-M9NA-X62 Vent valve
Piping
Chamber B:
Vacuum chamber: AI Chamber
Accessories:
Door grip opening mechanism
(2) Carrier sensor
Door sensor
O-Ring
Isolation valve (Between vacuum and vacuum)
Transfer system:
Carrier transfer mechanism
Carrier 2-stage exchange system
Substrate heating system:
Heating mechanism
Heater power supply
Temperature controller with overheating
Thermocouple
Measurements system:
ULVAC SPU Pirani vacuum gauge
SMC ZSE80F-A2L-R-M Atmospheric pressure switch
ULVAC SH2 Ionization vacuum gauge
Vacuum pumping system:
ULVAC CRY0-U12HSP Cryo pump
Main valve: No APC
Piping
Gas inlet system:
FUJIKIN FCST1005LUC-4J2-F200-AR MFC
Ar: 200 SCCM
Gas valve
SWAGELOK Type
Piping: Stainless steel
Etching chamber:
Vacuum chamber: AI Etching chamber
Accessories:
Door grip open mechanism
(2) Carrier sensors
Door sensor
O-Ring
Transfer system: Carrier transfer mechanism
RF Etching system: RF Etching unit
Cooling system: ESC Stage
Power supply system:
ADTEC TX30-DOOO-10 RF Power supply, 3 kW
ADTEC AMVG-3000-NC Match box, 3 kW
Rotation chamber:
Vacuum chamber: Rotation chamber: Fe and Plated
Accessories:
(4) Carrier sensors
O-Ring
Transfer system:
Carrier transfer mechanism
Carrier rotation mechanism
Vacuum pumping system:
U12HSP Cryo pump
Vacuum piping
Main valve: No APC
Measurement system:
ULVAC SPU Pirani vacuum gauge
SMC ZSE80F-A2L-R-M Atmospheric pressure switch
ULVAC SH2 Ionization vacuum gauge
Gas inlet system:
FUJIKIN FCST1005LUC-4J2-F200-AR MFC
Ar: 200 sccm
Gas valve
SWAGELOK Type
Piping: Stainless steel
Sputtering chamber (Ti):
Vacuum chamber: AI Sputter chamber
Accessories:
Door grip open mechanism
(2) Carrier sensors
Door sensor
O-Ring
Transfer system: Carrier transfer mechanism
Cathodes system: Magnetron cathode unit
Stage system: RF Bias Stage
Power supply system:
ADVANCED ENERGY Pinnacle DC Power supply, 20 kW
ADTEC TX30-DOOO-10 RF Power supply, 3 kW
ADTEC AMVG-3000-NC Match box, 3 kW
Sputtering chamber (Cu):
Vacuum chamber: AI Sputter chamber
Accessories:
Door grip open mechanism
(2) Carrier sensors
Door sensor
O-Ring
Transfer system: Carrier transfer mechanism
Cathode system: Magnetron cathode unit
(2) ADVANCED ENERGY Pinnacle 20 DC power supplies, 40 kW
Compressed dry air system:
Filter regulator unit
Solenoid valve unit
Piping
Speed controller
Cooling water system:
Water supply and return header manifold
Cooling water piping
Pressure switch
Flow meter
Structure frame system:
SS400 Frame
Panel.
ULVAC SIV-500F是一种先进的高性能溅射系统,专为电力电子和薄膜技术应用而设计。这个高度自动化的平台具有集成的光学、电气和等离子体诊断功能,可确保可重复、高质量的结果随移动而移动。它的基本组成部分是一个易于访问的工艺室和一个集成的光束线。重型水冷工艺室由不锈钢制成，经认证可用于200 mT的atm-ccn操作。除了一个有角度的目标支架外，该室还能容纳多达15个基片晶片，它还具有一个集成的转向磁铁和法拉第屏蔽层，用于无场、高精度的溅射沉积。集成束线具有两个非反应性蚀刻和沉积前表面处理的电子轰炸源。配备了先进的控制软件，SIV-500F设计为操作简单。它可以快速轻松地编程,以执行各种溅射配方,从而使用户能够准确复制结果,从而轻松优化过程。此外，所有参数和结果都可以存储和召回，供以后研究。可靠、高速、多源溅射工艺使ULVAC SIV-500F薄膜制造的理想选择。其先进的电源技术允许高电流、低电弧和快速倾斜时间。而且，它的溅射源可以独立控制，提供无与伦比的过程灵活性。这种灵活性可以通过可调输入功率、操作频率和工艺气流得到进一步增强。为了提高安全性,SIV-500F配备了先进的安全功能,如气体泄漏检测、自动关闭和紧急联锁开关。而且还设计了人性化的门锁、大的观景窗、高架照明。为了最大限度地提高吞吐量,ULVAC SIV-500F还提供了高级诊断工具,用户可以实时监视所有流程参数。为了进一步提高薄膜的制造效率，该系统还配备了专门用于温度和压力控制的硬件和软件，以及用于晶圆处理和输送机系统的自动化系统，以提高效率。总体而言,SIV-500F结合了鲁棒性、可靠性和增强的安全性,为工业和研究应用创建了完美的溅射工具。ULVAC SIV-500F集成了诊断、易于操作和高级功能,是创建高质量薄膜的理想选择。
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