用過的 VARIAN 3290 STQ #9134776 出售

This VARIAN 3290 STQ has been sold.

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ID#: 9134776

製造商:

VARIAN

模型:

3290 STQ

晶圓尺寸:

6"

设备详细信息:

Sputtering system, 6"
Entity target configuration:
Process station #2:ALSICU
Process station #3:ALSICU
Process station #4:ALSICU

Process station cathode configuration:
Station #2:Quantum(Ratating magnet)
Station #3:Quantum(Ratating magnet)
Station #4:Quantum(Ratating magnet)

Heater configuration:
Heater type (All station): DC BIAS
Heater controller(AII station): Eurotherm 808 x 3

Power supply configuration:
Outer PSU station #2: AE PINNACLE 12 KW
Outer PSU station #3: AE PINNACLE 12 KW
Outer PSU station #4: AE PINNACLE 12 KW

System vacuum configuration:
Compressor: Model 8600
8R Cryo pump: Yes
Water pump: No

Software configuration:
User's guide: ECS 3000
Version: 96.204.10U1
Floppy drive: 3.5"
Double cassette loading.
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