二手 RORZE FORS-300 #9215992 待售

Wafer sorter, 8"-12" (2) RAF-01013 Loadport EFEM Options: Single-arm, clean robot RR716L1523-3A6-001 RA410 Wafer aligner and orienter Alumina ceramic end effector, paddle-shaped: 2.3 mm Thick ADVANTECH PC With UNI-WIRE DI/O interface (2) Serial ports Ethernet interface and RS-232 communication to EFEM PC PATLITE SEFB-402D-RAGB Signal tower Ionizer Interior service lighting: 25 ft Candles per square foot (Minimum) Wafer presence detector: SUNX EX-13EA, Throughbeam, LED sensor (2) RORZE SEMI Loadports Throughput: > 150 Wafers per hours & Loadport cycle time with single-arm robot Reliability: MCBF >100,000 Cycles MTTR: 2 Hours (With spare parts) Mini-environment cleanliness: ISO Class 1 at 0.1 microns per ISO-14644-1 Wafer placement repeatability: +/-0.100mm in X & Y Direction, 3 sigma, +/-0.25° notch orientation, 3 sigma Safety devices and interlocks: EMO Switch Cover interlocks Utilities: Operating and storage ambient temperature: 20°C to 30°C (Non-condensing) Vacuum: -67 kPa to –93 kPa at 30 lpm System vacuum: –65kPa Connecter: ¼" Tube Pressurized air: 600kPa to 700kPa at 20 lpm Interface connections: LPU-1 COM: RS-232 Communication with left loadport LPU-2 COM: RS-232 Communication with right loadport HOST COM: RS-232 Communication with host EFEM PC IO LT TOWER: Full control of light tower Ethernet: Robot controller and EFEM PC VS 1: View screen VGA signal for control by host PC VS 2 EMO Out Keyboard Mouse PC VS Vacuum Sensor: Full control of protrusion sensor RS-232 Control of touch screen monitor PC Keyboard: PS/2 Keyboard connector to EFEM PC Compressor air Electrical power: 120V AC, ±10% at 23A (Maximum), 50/60Hz Power connector: Amphenol 97-3102A-20-3P.