二手 NIKON NSR 1755 i7A #9215746 待售
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ID: 9215746
晶圆大小: 6"
Stepper, 6"
Reticle size, 5"
ASAHI S78 Chamber
Chamber temperature: 23.0°C
(2) Nema boxes
(3) Lines for CVCF
Electric source
PDP11/73 Main computer
Maximum NA: 0.5
Variable reticle microscope: 15, 17.5
Wafer type: SEMI
Ring chuck, 6"
Hammer Pre-Alignment2: 6S
Wafer loader type-I
Chip leveling
Wafer carrier table left
FIA Alignment sensor
LSA Wafer alignment assist microscope
5517A HP Laser
Rack type left
Body OP Rack cable: 3M
TTLFC2 Focus check function.
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