二手 RIGAKU 3640 XRF #157114 待售
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ID: 157114
晶圆大小: 6"-8"
优质的: 2003
Wafer / Disk analyzer, 6"-8"
5 Standard elements for measuring:
Ti, TiW(90/10), Au, TiW/Au (layer 1 TiW & layer 2 Au), Ti/Au(layer 1 Ti & layer 2 Au)
Each correlation parts with (3) different thickness for measurement check
Applied to semiconductor / drive IC front end process of bumping
Configuration:
Main body: Measuring stage with vacuum function by X-ray
Main column and chamber
Single chamber only
Manual wafer transfer robot unit
Display unit:
Monitor shows statistic character on monitor
Power transformer BOC EDWARDS IL70 dry pump
Chiller: Yes
Utilities:
CDA
N2
PCW
Main M/C
Holders, 6"-8"
X-Ray tube
Ti Goniometer
Scanning goniometer
Heat exchanger
High voltage transformer
Automatic voltage regulation
Manual L/UL
Control and vision system:
Control system: PC Based with RS232 port
Operation man-machine interface: Color touch panel, 18"
Data collection: yes
Facility and environment:
Operation temperature: 15-25°C
Relative humility: ≤75%
N-2 for dry pump:
Flow rate: 10 mL/min
Pressure: 0.3~0.7 MPa (3~7kg/cm-2)
Cooling water for heat exchange:
Temperature: ≤ 30 °C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
Cooling water for dry pump:
Flow rate: 3.5 L/min
Temperature: ≤30°C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
(2) Operation manuals
Installation instruction
System module introduction
Operation instructions
Safety instructions
(2) Repair and maintenance manuals
PM Instructions
Trouble shooting instructions
Circuit diagram
208 VAC, 60 Hz, 3 Phase, 80A
Currently warehoused
2003 vintage.
RIGAKU 3640 XRF是一种能量色散X射线荧光设备，设计用于测量土壤、矿石、零件等材料中的微量元素成分。这套X射线系统结合了3 D扫描、高速数据采集和多通道分析仪等先进技术，提供了高精度的结果。3640 XRF的核心是产生短波长X射线的X射线激发源。然后，准直器将这些X射线对准样品材料。当X射线与材料相互作用时，它们激发材料中的电子，使它们发出荧光X射线。这些荧光X射线再由探测器收集，由多通道分析仪分析。多通道分析仪记录样品材料发出的X射线的强度、能量和光谱。RIGAKU 3640 XRF单元能够近乎实时地测量材料中不同元素的组成。这使得它可用于广泛的应用，如过程控制、质量保证和环境监测。机器还执行3D扫描,从而可以测量样品的多个深度和位置中的微量元素。该工具还旨在提供准确的结果。它使用高分辨率多通道分析仪，即使是最低能量元素也能检测到。此外,该资产的用户友好软件允许快速、轻松地导出数据以进行进一步分析。3640 XRF模型适用于研究、教育和工业环境中的多种应用。其先进的技术、准确性、可移植性和快速的安装时间使其成为任何类型项目的理想选择。
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