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TEL / TOKYO ELECTRON
Alpha 303i
LPCVD Furnace Process: TEOS Heater: VMM-56-002 FUIIKIN Air valve APC: CKD Gas: N2-1, Pure N2-1, O2,
146
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Diffusion furnace, 12" Type: Automation Heater Process chamber Temperature Controller Scavenger coo
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Alpha 303i
Furnace, 12" Type: Automation Heater Process chamber Temperature controller Scavenger cooling water
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Alpha 303i
Furnace, 12" Type: Automation Heater Process chamber Temperature controller Scavenger cooling water
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LP-CVD Furnace, 12" Process: DCS-HTO Heater type: VMM-56-306 FUJIKIN Air valve Gas: SiH4 / SiH2Cl2 /
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TEL / TOKYO ELECTRON
Alpha 303i
LPCVD System, 12" Gases: P-N2, NH3, SiH2CI2, CIF3 2005 vintage.
118
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TEL / TOKYO ELECTRON
Alpha 303i
Vertical diffusion furnace I/O Unit: EFEM Vacuum box Heater Back door I/O Top cover (Top front) FNC
141
热门产品
TEL / TOKYO ELECTRON
Alpha 303i
LP P-Doped poly furnace, 12" Process: D-Poly-small flow Boat operation: (2) Boats ASYST / ATR9100 F
130
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