二手 SATISLOH Satis 1200 DLS #9287995 待售

Box coater Compressed air: Pressure: 600 kPa (6 Bar) Consumption: 10 L/Batch Cold water: Pressure: 300 kPa (3 Bar) Consumption: 1050 L/h Consumption: 1200 L/h Temperature: 40°C Oxygen 99.998: Pressure: 10 kPa Consumption: 20 cm³/Batch Diffusion pump: BALZERS DIF 630 Diffusion pump Pumping speed: 20000 L/s Working range: 10^-7 - 1x10^-2 mbar Pump fluid consumption: 7.5 x 10^-5 g/mbar Power consumption: 10.5 kW Heating time: 50 min Cooling time: 90 min Roots pump: EDWARDS EH 1200 Roots pump Pumping speed: 1200 m³/h Rotation speed: 3500 RPM Rotary pump: EDWARDS E2M175S Rotary pump Pumping speed: 175 m³/h Rotation speed: 3500 RPM POLYCOLD PFC-1100-HC Wafer vapor cyropump Suction pressure: 10 Bar Discharge pressure: 10 Bar Meissner trap: Water vapor pumping speed: 50000 L/s Vacuum gauges: PIRANI Diffusion PIRANI Chamber PENNINGVAC IONIVAC Electron beam evaporation system: AIRCO TEMESCAL STIH-270 Emission current: 0.6 A Maximum High voltage output: 10 kV Maximum Crucible diameter: 133 mm (6) Pockets Beam deflection: 270°C Thin film deposition controller: INFICON XTC/C Quartz: (2) Single quartz heads Shutter with XTC/C Crystal range and precision: 6 to 5 MHz ± 0.05 Hz (Per 250 MSEC sample) Thickness accuracy: 0.5% Measurement frequency: 4 Hz Source control voltage: 0 to ± 10 V (2) Sources Substrate holder: Lens holder system: Flip over Diameter: 1140 mm (6) Segments Capacity: (120) Lenses of 72 mm (96) Lenses of 80 mm Water temperature controllers: EUROKLIMAT SPA 246/S Heating capacity: 4800 kcal/h Pump capacity: 8-31 L/min Pump pressure: 3.9-1.5 Bar Control hardware: PLC: Single, SIEMENS Digital sweep controller Partial pressure and flow gas XTC/2 Quartz Monitor Control PC: Industrial PC IBM compatible Operating system: Windows Control system 9000 Manuals included Power supply: 400/230 V, (3P+N+E) Main frequency: 50/60 Hz 2001 vintage.