二手 ASM A 412 #9114074 待售
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已售出
ID: 9114074
晶圆大小: 12"
LPCVD Vertical furnaces, 12"
Process: PH3 Doped poly/LPCVD
Software version: 6.80C
Heater type: MRL
Loader configuration, 4 or 5 loader: 4
Quartzware configuration
Outer tube: Quartz
Inner tube: Quartz
Boat: SiC boat
Boat fix ring/Cap quartz: Quartz
(6) Adiabatic plate
(1) SiH4, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L
(1) O2, Type (L-type, Straight, Diffuser, Shower): Multihole, E
(1) PH3, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L
Vacuum line configuration
Design: Original config
10 Torr Baratron model: MKS
10 Torr Baratron full scale setting: 10(F/S)
1000 Torr Baratron model: MKS
1000 Torr Baratron full scale setting: 1000(F/S)
ATM sensor model: MKS
Vent valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger
Check valve model: Fujikin
Check valve resistance pressure: 2.26 Kpa
Mainvalve type, Kitz or CKD: MKS
Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003)
Slow valve orifice size: 2.0mm (PV003)
Pressure range of vacuum gauge(Inficon Pirani gauge): 10T
Control table
Alarm watch/table setting
Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min))
U: 0.7/0.7/30S
CU: 0.7/0.7/30S
C: 0.7/0.7/30S
CL: 0.7/0.7/30S
L: 0.7/0.7/30S
Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S
MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S))
MFC1: N2: 2%/2%/10sec
MFC2: N2: 2%/2%/10sec
MFC3: N2: 2%/2%/10sec
MFC4: N2: 2%/2%/10sec
MFC5 SiH4: 2%/2%/10sec
MFC6: SiH4: 2%/2%/10sec
MFC7: SiH4: 2%/2%/10sec
MFC8: 1%O2/Ar: 1%/1%/10sec
MFC9: 5%PH3/N2: 2%/2%/10sec
MFC10: 5%PH3/N2: 2%/2%/10sec
MFC11: 5%PH3/N2: 2%/2%/10sec
MFC12: ClF3: 10%/10%/10sec
Transfer table
Wafer charge command (charge/discharge)
Side dummy
(5) Upper
(10) Lower
(100) Product
(5) Monitor
(105) Product & Monitor
Time
2nd Charge time(min): 0
Wafer cool time(min): 20min
Leak rate table
Base pressure low Limit(Torr): 1%
Base pressure High Limit(Torr): 1%
Leak Check check time(s): 60s
Leak limit(Torr): 1%
Retry Limit(count): 2
Loadlock settings
Loadlock configuration
O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0
Process
L/A Keep value (ppm): 10ppm
N2 Flow max (L): 1300L
N2 Flow min (L): 300L
Ready
L/A Keep value (ppm): 10ppm
N2 Flow max (L): 1300L
N2 Flow min (L): 300L
Idle
L/A Keep value (ppm): 10ppm
N2 Flow max (L): 1300L
N2 Flow min (L): 300L
L/A O2 limit (ppm): 10ppm.
ASM A 412是一种单区实验室扩散炉及配套配件,提供扩散过程中使用的高温处理能力。扩散工艺用于电子、玻璃、粉末冶金、航天制造等多个行业。炉子设计由两个主要部件组成;支架和炉膛。支架的主要目的是保持加热元件,并为腔室提供绝缘。炉膛装有工序零件,还有许多配件,可以进行各种设置。炉子通过可调温度控制器和手动升降机进行温度控制。ASM A412具有20英寸长、7.5英寸宽、7.5英寸深的加热室。腔室允许长时间保持高达2000 °F (1093 °C)的温度。为了有效地传热和均匀加热,腔室设有一个沿腔室长度延伸的单一加热线圈,并由电力驱动。加热元件包含在提供高效绝缘的结构中。这大大减少了热量损失,并确保整个腔室的温度更加一致。412炉包括一个电子温度控制器,它可以让用户准确地监测和调整腔室内的温度水平。控制器可以设置为一个工作温度范围,并且会自动调整腔室内部的温度以保持设定的温度。温度控制器还包括超温限值,以及内置计时器,因此可以安全高效地使用炉子。除了主炉室外,A412还包括两个附加的附件端口。第一个端口用于连接外部气体和/或真空线,而第二个端口可用于连接管式炉以预热材料。这些端口是为许多不同附件的连接而设计的,在使用熔炉时允许更大的灵活性。在使用方面,ASM A 412是为手动和半自动操作而设计的。ASM A412采用一键式操作,可以快速、轻松地进行设置,非常适合研究或生产运行。炉子可以用最小的努力来安装和操作,这意味着扩散过程可以快速高效地完成。总体而言,A 412是一个单区实验室扩散炉及其附属配件,提供扩散过程中使用的高温处理能力。它具有有限的终身保修,非常适合在工业、研究和教育设施中使用。凭借其简单的设计、直观的用户界面和可靠的性能,A412是任何实验室扩散需求的理想选择。
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