二手 ASM Advance 300 VT #9206101 待售

Vertical LPCVD furnace Process: Oxide CIM Main system: Main body (Carrier stage) Utility box Handler system: Wafer handing robot Boat elevator Cassette loader General configuration: System layout type: U/Box type(I) System hand: LL N2 Load lock Heater type: Temp wire Torch heater Process gasses: Gas 1 / N2(30SLM) Gas 2 / O2(20SLM) Gas 3 / HCL Gas 4 / N2O Gas 5 / H2O Gas distribution system: Basic style: Conventional gas system Tubing material: Stainless steel Tubing finish: Nupro MFC Unit Wafer/Cassette handling: Wafer type: 8" SEMI STD-Notch Cassette type: Entergris/704-503T2 (25) Cassette wafers (16) Cassette storage Fork type/Material Boat / Pedestal: (150) Production wafers Does not include boat rotation System controls: System controller: IBM 486 OS2 Torch controller: H2O Separate element pre burner Signal tower colors: G/A/B General pressure display units: Pressure PSI Cabinet exhaust display units: H2O ASM Furnace temp controller Host communications: Host communications: User host computer User host computer I/F: SECS I/II (RS232) Information transfer protocol: GEM Equipment host I/F connection: U/BOX Top HIA Group controller Power input: Voltage: 3-Phase, 208VAC Voltage: 1-Phase, 120VAC UPS Input / Output voltage: 120V/100V 1997 vintage.