二手 CENTROTHERM E 240 / Euro 2000 #104065 待售
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ID: 104065
晶圆大小: 4"
优质的: 1988
Horizontal diffusion furnace, 4"
Specifications:
Wafer size: 4"
Can be converted to 6" with cantelever loading system, software adjustable
Power: 384kW
ID tubes: 155 to 160 mm
C, D, E, R stacks (16 FUR.)
Temperature range: 400°C to 1200°C
CENTROTHERM controller
Gas cabinet with MFCs, exhaust facility
Soft-landing system for loading and unloading wafer under laminar
Process configuration: (4) stacks x (4) tubes
E stack:
E1: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E2: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 55slm O2, 10slm H2, 500sccm N2 (source)
E4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 10slm O2, 10slm H2, 999sccm N2 (source)
F stack:
F1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F2: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
F4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
C stack:
C1: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 1000sccm O2, 999sccm N2 (source)
C2: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 500sccm O2, 999sccm N2 (source)
C3: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 999sccm O2, 999sccm N2 (source)
C4: Al alloy
Gases: O2 / N2
MFC capacity: 999slm N2, 5slm O2, 2slm H2, 500sccm N2 (source)
D stack:
D1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
D2: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 999sccm O2
D3: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1slm O2
D4: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1000sccm O2
Old furnace:
#22: Thick Al alloy
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
#23: N-type doping using POCL3
Gases: O2 / N2 / N2(S)
Rotameter capacity: 150CD N2, 150CD O2, 150CD N2 (source)
#24: Gold drive
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
Spares inventory:
Furnace:
STC / TCU interconnecting cable
(Qty 5) THERMOWELL oil units
(Qty 2) CU406 SCPB 40 DGT display boards
(Qty 2) Magnetic coupling
EXT grade wire: OMEGA RS-20-100
Thermocouple extension wire, 250'
(Qty 67) Thermocouple connectors: Omega GMP-R/S M
(Qty 80) Thermocouple connectors: Omega GMP-R/S F
(Qty 17) Grounded mini connectors: RS M
(Qty 29) Grounded mini connectors: RS F
(Qty 3) Custom heavy gauge diffusion cartridges: AD-1419
Cartridge
2-pole gold plated contact: SW142G-10-B
2-pole gold plated contact: SW142G-10-M
Set switch gold plated contact: OSWG3-10
TOL-O-MATIC cable cylinder (Aluminum tube): CC 10 SK 70
(Qty 3) Thermocouple panel meters, 230V: Omega DP 41 - TC 230
Thermocouple and fine wire welder: TL-WELD 230VAC
(Qty 4) Reference junction thermostats, VT60: 1018
Paddle belt, 12m
MFCs:
(Qty 4) MFC: COASTAL H2: 10 SLM UFC-1100A
MFC: COASTAL O2: 500 SCCM UFC-1100A
MFC: COASTAL O2: 1 SLM UFC-1100A
(Qty 2) MFC: COASTAL O2: 5 SLM UFC-1100A
(Qty 2) MFC: COASTAL N2: 10 SLM UFC-1100N
(Qty 2) MFC: COASTAL N2: 999 SCCM UFC-1100A
MFC: COASTAL SiH4: 500 SCCM FC-260
MFC: COASTAL NH3: 3 SLM FC-260
(Qty 3) MFC: MYKROLIS O2: 500 SCCM FC-2900V
MFC: MYKROLIS O2: 1000 SCCM FC-2900V
MFC: MYKROLIS N2: 1000 SCCM FC-2900V
(Qty 2) MFC: MYKROLIS H2: 10 SLM FC-2900V
(Qty 2) Cards Lag 03: p/n 001112
Display card: p/n 001022
Card: p/n 001824
Locals:
Teflon coated wire, 2-core: 20m
(Qty 3) FESTO cylinders: p/n DGS-25-50-PPV-A
(Qty 3) FESTO cylinders: 10 bar
(Qty 15) FESTO sensors
(Qty 4) Solenoids
(Qty 6) Batteries, 3.3V
(Qty 400) Miscellaneous ICS: EEPROMS, Digital ICS, reg and microprocessor
Quartzware:
(Qty 7) Tubes, 2,150 mm (161 mm dia) TESLA: DQ4-39
(Qty 6) Tubes, 2,150 mm (155 mm dia) TESLA: DQ4-09
THERMCO tube, 1,840 mm: DQ4-15
(Qty 10) TESLA cross slotted boats: DQ4-20
THERMCO cross slotted boat: DQ4: 01
(Qty 6) Hydrox quartz balloons: DQ4-05
Thermocouple sheath, outer: DQ4-11
(Qty 2) White elephants: DQ4-17
(Qty 3) Inverted boats: 92 slots: DQ4-34B
(Qty 31) Inverted boats: 84 slots: DQ4-34A
(Qty 2) Boat holders: DQ4-18
(Qty 12) Injectors: DQ4-04
(Qty 2) Adaptors: DQ4-08
(Qty 3) Baffles: DQ4-12
(Qty 4) Paddles: DQ4-03
(Qty 3) End caps: DQ4-16
(Qty 10) Discs: DQ4-37
(Qty 3) Push rods: DQ4-09
(Qty 2) Plugs: DQ4-26
(Qty 5) Thermocouple sheaths, inner: DQ4-41
(Qty 3) Quartz ladders: DQ4-32
Thermocouple, p/n 101 4T-720-R-020
Facility requirements:
Electrical: 440VAC, 3-phase, 50/60Hz, 24kW maximum for single furnace
Cold water: 60 PSI, 15°C to 20°C
Air: 40 PSI
O2, H2, N2: 40 PSI
Exhaust
1988 vintage.
CENTROTHERM E 240/Euro 2000扩散炉以其创新的结构和多用途可靠的运行提供了最高的性能水平。这个现代的扩散炉结合了100瓦加热元件的鲁棒性和功率以及温度传感器的灵敏度来控制温度。它的高级功能包括易于使用的触控、用于读取实时温度值的数字显示屏以及用于执行日常工作的用户友好软件,例如生成流程报告、控制多个设备和单独配置区域。E 240/Euro 2000扩散炉采用双壁级联和可移动热点,以实现最佳的传热和温度稳定性。由此产生的均匀热分布可以通过多种方式进行调整,有一系列的可变通量元素和热区点配置。它还具有高效的温度控制冷却系统,先进的真空技术对环境进行终极控制,以及高质量的绝缘以最大限度地提高能效。该炉配有三相功率转换、可调导引和集成式安全开关。具有均匀性可调、热点可快速调节、载气流动路径可调等特点。CENTROTHERM E 240/Euro 2000具有可调节的动态过程窗口,可严格控制沉积过程。其集成的运动控制平台和负载锁允许用户对多达32个程序进行编程和存储,每个程序最多600个步骤。E 240/Euro 2000提供了一整套配件,如预处理室样品、可编程的自动小零件进纸器、退火和翻新托盘,以及一系列定制设计的工具。这些配件使用户能够根据自己的具体要求对炉子系统进行充分的调整,从而使工艺室的设计和建造与预期功能完美匹配。最后,CENTROTHERM E 240/Euro 2000扩散炉的设计是为了最大限度的正常运行时间和可靠性,让用户对他们的炉的性能保持信心。坚固的结构和加固的包层有助于保护敏感的工作部件,低维护的结构有助于减少停机时间,从而提高生产率和盈利能力。
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