二手 HITACHI / KOKUSAI DD-1223V #9190226 待售

ID: 9190226
晶圆大小: 12"
优质的: 2001
Furnace, 12" Process: Pyro (100) Process wafers Process type: Oxide Gas supply: Bottom PCW Supply: Bottom Boat operation: 1Boat Load lock: No (25) Carrier slots System control: Main controller: CX3002C Touch screen operation Gas flow chart (Front, Rear) Temperature controller: CQ1600 Pressure control: EPV100-AW Controller power: Ø1 208V 150A Heater power: Ø3 208V 350A Oxygen analyzer: No Tape heater controller: SR Mini Torch Process gases: Process gas 1: N2 Process gas 2: N2 Process gas 3: O2 Process gas 4: O2 Process gas 5: H2 Process gas 6: Hcl Process gas 7: N2 Process gas 8: N2 Gas distribution system: Basic style: FUJIKIN IGS Tubing material: SUS-316L Tubing finish: VCR Manual valve: FUJIKIN Air operated valve: FUJIKIN Regulator: AP Tech MFC (Maker. Model): AERA GAS Detector Exhaust distribution system: Air operated valve type APC EPV-100 Baratron gauge Main valve Cold trap Pump line Wafer / Cassette handling: Wafer alignment: No (16) Cassette storage Cassette in/out port Cassette handling robot Wafer transfer type: 1+4 Fork material: Ceramic (5) Forks Fork variable pitch Fork wafer presence sensor Elevator handling: Boat elevator Auto shutter Boat rotation Mechanical parts Heating chamber: D4EX16975-1 Heater TC Type: No Spike T/C Overtemp protect T/C Door interlock Exhaust System: Heater exhaust Gas box exhaust Process exhaust ETC: Handy terminal Maintenance zig: No Operation manual: No Electrical manual: No Mechanical manual: No Boat cap ass'y: No Manifold ass'y Cap base ass'y Tube setting part ass'y Missing parts: Scavenser EXH MS3 Sensor Torch TC Currently warehoused 2001 vintage.
HITACHI/KOKUSAI DD-1223V是一种用途广泛的扩散炉设备,可用于一系列应用,包括半导体和太阳能电池制造、薄膜沉积和其他工艺炉应用。HITACHI DD-1223V具有绝缘石英管和1200 °C的最高炉温。该炉可安装在垂直和水平两种结构中,包括用于调节氧气和氮气平衡水平的室内气体系统。KOKUSAI DD-1223V配有一套旨在支持各种工艺要求的配件。这些附件包括一个减少污染的石英衬管、一个收集排气的收集板、一个防止电弧的阳极环和一个控制基板温度的坩埚加热器。此外,该炉还包括各种安全功能,如气体监测装置、可燃气体过滤器、安全关闭装置以及温度超过预设限值时的自动关闭装置。DD-1223V具有易于使用的触摸屏界面以及针对不同流程的各种预编程配方。该炉通过与Windows兼容的PC进行编程,并且可以通过网络连接进行远程操作。此外,该炉还包括一个用于连接外部系统的RS 232接口,允许用户访问额外的控制和监控功能。HITACHI/KOKUSAI DD-1223V的设计既耐用可靠,又节能。该炉由坚固的铝制成,包括一个双绝缘石英管,以减少热量损失,同时产生一致的温度贯穿始终。该炉还包括水冷机,通过电源和控制电路循环冷却剂,以确保安全运行和冷却效率。HITACHI DD-1223V扩散炉及配件是一种易于使用、用途广泛的工具,体积小巧,节省空间,适用于各种洁净室和工业应用。它提供可靠的操作、广泛的过程控制功能、先进的安全功能和易于维护。KOKUSAI DD-1223V以其直观的触摸屏界面、全面的配件包以及广泛的预编程配方选择,是任何用户的绝佳选择。
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