二手 HITACHI / KOKUSAI DD-1223V #9190226 待售
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ID: 9190226
晶圆大小: 12"
优质的: 2001
Furnace, 12"
Process: Pyro
(100) Process wafers
Process type: Oxide
Gas supply: Bottom
PCW Supply: Bottom
Boat operation: 1Boat
Load lock: No
(25) Carrier slots
System control:
Main controller: CX3002C
Touch screen operation
Gas flow chart (Front, Rear)
Temperature controller: CQ1600
Pressure control: EPV100-AW
Controller power: Ø1 208V 150A
Heater power: Ø3 208V 350A
Oxygen analyzer: No
Tape heater controller: SR Mini
Torch
Process gases:
Process gas 1: N2
Process gas 2: N2
Process gas 3: O2
Process gas 4: O2
Process gas 5: H2
Process gas 6: Hcl
Process gas 7: N2
Process gas 8: N2
Gas distribution system:
Basic style: FUJIKIN IGS
Tubing material: SUS-316L
Tubing finish: VCR
Manual valve: FUJIKIN
Air operated valve: FUJIKIN
Regulator: AP Tech
MFC (Maker. Model): AERA
GAS Detector
Exhaust distribution system:
Air operated valve type
APC EPV-100
Baratron gauge
Main valve
Cold trap
Pump line
Wafer / Cassette handling:
Wafer alignment: No
(16) Cassette storage
Cassette in/out port
Cassette handling robot
Wafer transfer type: 1+4
Fork material: Ceramic
(5) Forks
Fork variable pitch
Fork wafer presence sensor
Elevator handling:
Boat elevator
Auto shutter
Boat rotation
Mechanical parts
Heating chamber:
D4EX16975-1 Heater
TC Type: No
Spike T/C
Overtemp protect T/C
Door interlock
Exhaust System:
Heater exhaust
Gas box exhaust
Process exhaust
ETC:
Handy terminal
Maintenance zig: No
Operation manual: No
Electrical manual: No
Mechanical manual: No
Boat cap ass'y: No
Manifold ass'y
Cap base ass'y
Tube setting part ass'y
Missing parts:
Scavenser EXH MS3 Sensor
Torch TC
Currently warehoused
2001 vintage.
HITACHI/KOKUSAI DD-1223V是一种用途广泛的扩散炉设备,可用于一系列应用,包括半导体和太阳能电池制造、薄膜沉积和其他工艺炉应用。HITACHI DD-1223V具有绝缘石英管和1200 °C的最高炉温。该炉可安装在垂直和水平两种结构中,包括用于调节氧气和氮气平衡水平的室内气体系统。KOKUSAI DD-1223V配有一套旨在支持各种工艺要求的配件。这些附件包括一个减少污染的石英衬管、一个收集排气的收集板、一个防止电弧的阳极环和一个控制基板温度的坩埚加热器。此外,该炉还包括各种安全功能,如气体监测装置、可燃气体过滤器、安全关闭装置以及温度超过预设限值时的自动关闭装置。DD-1223V具有易于使用的触摸屏界面以及针对不同流程的各种预编程配方。该炉通过与Windows兼容的PC进行编程,并且可以通过网络连接进行远程操作。此外,该炉还包括一个用于连接外部系统的RS 232接口,允许用户访问额外的控制和监控功能。HITACHI/KOKUSAI DD-1223V的设计既耐用可靠,又节能。该炉由坚固的铝制成,包括一个双绝缘石英管,以减少热量损失,同时产生一致的温度贯穿始终。该炉还包括水冷机,通过电源和控制电路循环冷却剂,以确保安全运行和冷却效率。HITACHI DD-1223V扩散炉及配件是一种易于使用、用途广泛的工具,体积小巧,节省空间,适用于各种洁净室和工业应用。它提供可靠的操作、广泛的过程控制功能、先进的安全功能和易于维护。KOKUSAI DD-1223V以其直观的触摸屏界面、全面的配件包以及广泛的预编程配方选择,是任何用户的绝佳选择。
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