用過的 KOKUSAI QUIXACE II 出售

This KOKUSAI QUIXACE II has been sold.

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ID#: 9027427 製造商: KOKUSAI 模型: QUIXACE II 類別: DIFFUSION FURNACES & ACCESSORIES 晶圓尺寸: 12" 设备详细信息: Vertical furnace, 12"
Single tube
Product load size: 125
Rapid Heating / Cooling (RHC)
Boat rotation
SEMI S2-0200E compliance
Main and sub (rear) operation controllers

Main controller: CX5000
SEMI EDA capability
Dual boat 125 WLS
Integrated Gas System (IGS) type: Fujikin 1.125"
RHC1 upgrade
Quartzware (1st set)
Rear operation panel
(2) Hard gas pattern panels
HPM (toxic gas) interlock
POD ID reader (AdvanTag GATEWAY HSMS)
OHT capability
Exhaust APC
Boat rotation type: N2 purged rotation
Self gas cleaning
EEMS CX-9800 server capacity and license

Options:
Canister (BK1200) for TiCl4
Bubbler (VG600W).
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