二手 TEL / TOKYO ELECTRON Alpha 805C #293756811 待售
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ID: 293756811
晶圆大小: 8"
优质的: 1994
Furnaces, 8"
Type: LP-CVD
Process: TEOS
FUJIKIN Air valve
VMM-35-001 Heater
MFC, MFM: STEC
Gases: PN2, O2, TEOS
Operating panel
Gas flow chart panel
Panel switcher
Hardware switches
Floppy Disk Drive (FDD)
Heater chamber
Process tube (Reaction tube)
Auto-door
I/O Port
Cassette transfer
Stocker
Transfer stage
Wafer transfer
Boat elevator
Auto shutter
Scavenger
Cooling water unit
Temperature controller
Machine and pressure controller
Boat stage
(5) Fork
Signal tower
Manifold
Display
Power control system
Gas unit
Vacuum sensor
ETC
Power:
3 Phase, 208 VAC
Single Phase, 100 VAC
1994 vintage.
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