二手 TEL / TOKYO ELECTRON Alpha 8SE-Z #293736532 待售
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ID: 293736532
晶圆大小: 8"
优质的: 2007
Furnace, 8"
Process: SOD
Type: LP-CVD
Air valve: FUJIKIN, CKD
STEC
Gas box
Gases: N2, P-N2, O2, H2
Waves controller
Gas flow chart panel
Floppy Disk Drive (FDD)
Heater chamber
I/O Port
Cassette transfer
Wafer transfer
Temperature controller
Signal tower
Utility box:
Power controller
Machine controller
Pressure controller
Water Vapor Generator (WVG)
Gas flow chart panel
Power box:
EMO Unit
Control board
Transformer
SCR Controller
N2 Purge unit
RCU Unit
Operating system: Linux
Power supply: 208-120 V
2007 vintage.
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