用過的 TEL / TOKYO ELECTRON ALPHA 8SE 出售

This TEL / TOKYO ELECTRON ALPHA 8SE has been sold.

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ID#: 122707 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8SE 類別: DIFFUSION FURNACES & ACCESSORIES 釀酒: 2007 晶圓尺寸: 8" 设备详细信息: Thermal process furnace, 8"
Flat type wafer
Signal tower: (4) color
I/O type
Rapid cooling unit
Capacity: (125) wafers per batch

Controller
Waves V3.23 R001 (D01FFF-000F)
(2) HDD: 4.3 GB
TEB 408 HDMC Rev 2.0B
SVA 041
TEB 107 ECS5
DVE P750/51-TR
TEB 103 FPIF

Temperature controller: 560A
Pressure controller: CKD VEC-CP2
WVG controller: WVG-SC-010Y1B2B

Vacuum pump: Ebara A150W-T

2007 vintage.
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