二手 TEL / TOKYO ELECTRON UL 2604-10H #61662 待售

Furnaces Cantilever loading system Pyrogenic gas system Furnace 1: Tube 1: Oxidation process (5) MFC Gas jungles with SCHUMACHER TSC107 bubbler MFC 1: High N2 MFC 2: High O2 MFC 3: Low O2 MFC 4: H2 MFC 5: Low N2 for SCHUMACHER Bubbler H2 O2 Torch Tube 2: Oxidation process (5) MFC Gas jungles with SCHUMACHER TSC107 Bubbler MFC 1: High N2 MFC 2: High O2 MFC 3: Low O2 MFC 4: H2 MFC 5: Low N2 for SCHUMACHER Bubbler H2 O2 Torch Tube 3: Boron diffusion process (2) MFC Gas jungles with SCHUMACHER Bubbler TSC107 MFC 1: High N2 MFC 2: High O2 Tube 4: Sinter process MFC Gas jungle with SCHUMACHER bubbler TSC107 Furnace 2: Tube 1: Drive in process (5) MFC Gas jungles with SCHUMACHER TSC107 bubbler MFC 1: High N2 MFC 2: High O2 MFC 3: Low O2 MFC 4: H2 MFC 5: Low N2 for SCHUMACHER bubbler H2 O2 Torch Tube 2: Drive in process (5) MFC Gas jungles with SCHUMACHER TSC107 bubbler MFC 1: High N2 MFC 2: High O2 MFC 3: Low O2 MFC 4: H2 MFC 5: Low N2 for SCHUMACHER bubbler H2 O2 Torch Tube 3: Boron diffusion process (2) MFC Gas jungles with SCHUMACHER bubbler TSC107 MFC 1: High N2 MFC 2: High O2 Tube 4: Sinter process MFC Gas jungle with SCHUMACHER bubbler TSC107.