二手 AMAT / APPLIED MATERIALS DPS G5 #9375195 待售

Poly etcher, 12" AC Remote power rack CHX Chiller EDWARDS IXM 1800 Dry pump Chambers: (3) DPS (A, B, C) AXION (D) FI (EFEM): UPS MKS Macronode Keyboard Video Mouse (KVM) Ethernet switch hub Fast Data Gateway (FDG) Short flex controller assy Light curtain Load port RFID Aligner Robot controller Ionizer controller Light tower Intake plenum enclosure MF: Type: AP TM Robot TM Robot controller TM Robot blade Integrated point of use pump (I-PUP) TM Baratron gauge TM Vacuum gauge Load lock vacuum gauge Load lock indexer controller TM Diffuser Load lock vent valve Load lock heater controller Load lock door Auto Pressure Controller (APC) Slit valve GME Chamber port Assy Lid Bulk gas delivery Modular DNET IO Controllers (MDI) Process chamber: Chamber Control Module (CCM) Source coil Source ceramic lid Source lid heater Upper liner Lower liner Cathode liner Flow equalizer Slit liner door Cathode assy ESC RF Filter box AC Distribution box Temperature controller Throttling gate valve Eyed OES Spectrograph Electrostatic Chuck (ESC) HE Controller Ion gauge Pumpstack Chamber lift assy TGN Gas delivery Vacuum gauge Vacuum switch Pump Foreline ISO Valve RF Match box and generator Strip chamber: Chamber Control Module (CCM) Pedestal assy Throttling gate valve Foreline ISO Valve AC Distribution box Temperature controller Vacuum gauge Vacuum switch Remote plasma source Gas panel: Type: NEXTGEN (16) Sticks Gas weldment type: Single line drop Mass Flow Controller (MFC) Flow Ratio Controller (FRC).