二手 AMAT / APPLIED MATERIALS DPS II #9255366 待售
网址复制成功！
单击可缩放
ID: 9255366
晶圆大小: 12"
Poly etcher, 12"
ADVANCED ENERGY Navigator 3013 Source matcher, 3155132-004
ADVANCED ENERGY Navigator 1513 Bias matcher, 3155126-020
ADVANCED ENERGY APEX 3013 Source generator, 3156113-006
ADVANCED ENERGY APEX 1513 Bias generator, 3156110-005
ALCATEL / ADIXEN / PFEIFFER A100L Load lock pump
PC: Pentium 4
Chamber A, B and C:
ESC, 0041-26723
Ceramic lid, 0200-06404
Hub, 0200-04969
Gas nozzle, 0050-88146
Quartz single ring, 0200-04619
Insulator, Quartz, 0200-36034
Lower chamber liner, 0040-43977
Upper chamber liner, 0040-81156
Cathode liner, 0021-26273
Plasma screen, 0021-26274
Lift pin, 0200-04593
Plasma screen screw cover, 0200-00933
SLD Door, 0020-89739
TGV, 0190-29611
High voltage module, 0190-23905
Lid heater, 0090-04235
FE-ICP, 0010-37963
Source outer coil capacitor, 0630-00665
TGN Gas line, 0050-88146
Gas nozzle lower clamp, 0041-10491
Gas nozzle upper clamp, 0041-10490
PCB Water leak detector, 0190-02076
Interlock module, 0190-17964
CPCI 3U Quad serial communication, 0190-23509
CPCI48 Digital 48 I/O, 0190-07450
CPCI 32/16 Analog 32/16 I/O, 0190-22967
Dnet BUS scanner, SST CPCI, 0190-16926
SBC C400MHZ 3U 4HP 64M RAM Vx works, 0190-24007
One slot 3U Power supply, 0190-07502
Helium controller (IHC) assy, 0010-07061
Heater controller, 0190-26495
EyeD SRM, 0190-28658
EyD Fiber optic cable, 0190-19764
EPD Window point, 0200-02160
Manometer window port, 0200-39135
Chamber D:
Throttle valve, 3870-03335
SLD Door, 0040-47461
Temperature controller, 0010-19317
Interlock module axiom, 12", 0190-15733
DIP Board, 0190-07450
AIO Board, 0190-22967
D-Net scanner board, 0190-16926
SBC Board, 0190-24007
Power supply board, 0190-07502
Serial communication board, 0190-23509
Pedestal, 0010-34860
Lift pin, 0021-43884
Top cap, GDP, Axiom HT, 0200-02980
Liner, side GDP, Axiom HT, 0200-02981
Lower GDP, HT2, Axiom, 0200-02272
Insert quartz glass, 3350-00048
Single ring, 0020-47977
Gas configuration:
Chamber A:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 70
Gas06 / O2 / 200
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500
Chamber B:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 200
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500
Chamber C:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 1000
Gas07 / O2_S / 20
Gas08 / SF6 / 100
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500.
AMAT/APPLIED MATERIALS DPS II是一种先进的蚀刻/灰烬设备,其设计目的是在微电子应用中产生优异的表面效果。该系统由多室超高真空处理室、独特的烧蚀技术、精密的传感器封装组成。AMAT DPS II是湿法和干法蚀刻、灰化和沉积过程中严格控制的理想方法。APPLICED MATERIALS DPS II专为电介质和半导体材料的蚀刻、灰化和沉积而设计。其超高真空室能够达到低于10-8 Torr的压力和碳束壁衬，从而最大限度地减少排气。先进的烧蚀技术进一步提高了设备性能，允许精确控制过程参数和可靠的过程重复性。DPS II的高级传感器包确保了对工艺参数的精确控制。它由两个独立的控制器和四个温度、压力和射频功率监测的高温计组成。另外，三个热电偶和四个数控质量流控制器确保了可重复、稳定的过程控制。此外，该机还具有边缘机器，可提供卓越的晶圆定向检测、精密晶圆操作和晶圆定向冷却。独特的AMAT/APPLIED MATERIALS DPS II传感器包提供了多种优点，包括室温均匀性和稳定性优越，吞吐量提高，表面质量提高。此外,先进的烧蚀技术允许精确,可重复蚀刻,灰化和沉积过程控制.此外，它的多室设计允许将多个蚀刻/灰烬工艺集成到一个工具中，从而节省时间和金钱。总体而言，AMAT DPS II是一种先进的蚀刻/灰分资产，旨在为微电子应用提供卓越的表面效果。其超高真空室，独特的烧蚀技术，先进的传感器包确保精确，可重复的过程控制。此外，它的多室模型设计允许将多个蚀刻/灰烬工艺集成到单个设备中，从而提高吞吐量，同时将成本降至最低。
还没有评论