二手 AMAT / APPLIED MATERIALS DPS II #9255367 待售
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ID: 9255367
晶圆大小: 12"
Poly etcher, 12"
ADVANCED ENERGY Navigator 3013 Source matcher, 3155132-004
ADVANCED ENERGY Navigator 1513 Bias matcher, 3155126-020
ADVANCED ENERGY APEX 3013 Source generator, 3156113-006
ADVANCED ENERGY APEX 1513 Bias generator, 3156110-005
ALCATEL / ADIXEN / PFEIFFER A100L Load lock pump
PC: Pentium 4
Chamber A, B and C:
ESC, 0041-26723
Ceramic lid, 0200-06404
Hub, 0200-04969
Gas nozzle, 0050-88146
Quartz single ring, 0200-04619
Insulator, Quartz, 0200-36034
Lower chamber liner, 0040-43977
Upper chamber liner, 0040-81156
Cathode liner, 0021-26273
Plasma screen, 0021-26274
Lift pin, 0200-04593
Plasma screen screw cover, 0200-00933
SLD Door, 0020-89739
TGV, 0190-29611
High voltage module, 0190-23905
Lid heater, 0090-04235
FE-ICP, 0010-37963
Source outer coil capacitor, 0630-00665
TGN Gas line, 0050-88146
Gas nozzle lower clamp, 0041-10491
Gas nozzle upper clamp, 0041-10490
PCB Water leak detector, 0190-02076
Interlock module, 0190-17964
CPCI 3U Quad serial communication, 0190-23509
CPCI48 Digital 48 I/O, 0190-07450
CPCI 32/16 Analog 32/16 I/O, 0190-22967
Dnet BUS scanner, SST CPCI, 0190-16926
SBC C400MHZ 3U 4HP 64M RAM Vx works, 0190-24007
One slot 3U Power supply, 0190-07502
Helium controller (IHC) assy, 0010-07061
Heater controller, 0190-26495
EyeD SRM, 0190-28658
EyD Fiber optic cable, 0190-19764
EPD Window point, 0200-02160
Manometer window port, 0200-39135
Chamber D:
Throttle valve, 3870-03335
SLD Door, 0040-47461
Temperature controller, 0010-19317
Interlock module axiom, 12", 0190-15733
DIP Board, 0190-07450
AIO Board, 0190-22967
D-Net scanner board, 0190-16926
SBC Board, 0190-24007
Power supply board, 0190-07502
Serial communication board, 0190-23509
Pedestal, 0010-34860
Lift pin, 0021-43884
Top cap, GDP, Axiom HT, 0200-02980
Liner, side GDP, Axiom HT, 0200-02981
Lower GDP, HT2, Axiom, 0200-02272
Insert quartz glass, 3350-00048
Single ring, 0020-47977
Gas configuration:
Chamber A:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 200
Gas07 / O2S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 500
Gas11 / HE / 500
Gas12 / AR / 500
Chamber B:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 1000
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 500
Gas11 / HE / 500
Gas12 / AR / 400
Chamber C:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 300
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 300
Gas11 / HE / 500
Gas12 / AR / 500.
AMAT/APPLIED MATERIALS DPS II是一种感应耦合等离子体（ICP）蚀刻设备。它是一种高端、大型、感应耦合蚀刻（ICE）系统，具有单容器批刻蚀刻、高工艺均匀性和高吞吐量等特点。AMAT DPS II是一个顶级的蚀刻单元，具有四个流通室，集成到机器。这些腔室设计用来蚀刻各种材料，包括有机介电和金属薄膜，以及硬掩模、外延和晶片电阻层。该工具可以配置为在一个或多个腔室模式下蚀刻,最多同时具有四层。APPLICED MATERIALS DPS II还具有先进的过程控制技术,具有基于客户和OEM配方的集成数据库。这使资产能够实现良好的蚀刻一致性、高吞吐量和明确定义的过程参数。DPS II具有广泛的蚀刻化学，从CF4-based ‘hard mask’蚀刻和XeF2-based抗蚀刻到微波碳蚀刻。这种型号的化学性能和灵活性使用户能够蚀刻各种材料，从硅到GaAs等等。AMAT/APPLIED MATERIALS DPS II还具有先进的电压源智能电源,可提供可调功率、频率和补偿功能,以实现精确、可重复的蚀刻。该设备可与各种过程模拟软件工具集成，提供精确的蚀刻过程虚拟模型，并协助过程优化。AMAT DPS II已被证明是制造微电子和光电元件的重要工具。它的灵活性、用户友好的界面和高级工艺能力使其成为制造用于半导体和光电应用的高性能、可靠元件所需的复杂工艺的重要组成部分。
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