二手 AMAT / APPLIED MATERIALS Gas box for Centura DPS II #9407681 待售
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ID: 9407681
AMAT Centura DPS II Gas Box是一款为在高真空环境下运行而设计的蚀刻器/asher。气箱由不锈钢制成,旨在对半导体制造过程中使用的蚀刻气体流动进行精确可靠的控制。通过对反应性气体流动的精确控制,Centura DPS II允许生产高质量、无缺陷的半导体器件。燃气箱采用两个独立的气体分配歧管,每个歧管控制一个独立数量的工艺气体管线。这些管线可输送多达9种工艺气体,包括蚀刻、清洁、退火或沉积气体。综合泄漏率检测设备监测和记录气体消耗水平,而先进的控制系统则能够精确控制每种气体的比例。该装置还包括综合RFID气体识别和自动核查进入的气瓶以及综合加热器,以确保对加工气体进行精确的温度控制。Centura DPS II燃气箱还提供卓越的安全功能。软件警报可以定制,以便在检测到不安全的化学物质水平时提醒操作员,而创新的超低清除能力可减少危险的副产品。该机还具有自动通风的任何过压管路,确保安全操作。最后,Centura DPS II燃气箱使操作简单、人性化。板载控制器与直观的图形用户界面相结合,有助于高效的操作和快速的流程开发。这一控制工具还能够有效管理流程配方,下载和保存多达2000份配方。总体而言,APPLIED MATERIALS Centura DPS II气箱是控制蚀刻气体流动和在高真空环境下生产高质量、无缺陷半导体器件的理想解决方桉。
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