二手 DENTON VACUUM Z-Flex #293818726 待售
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ID: 293818726
晶圆大小: 8"
Ion Beam Deposition (IBD) system, 8"
(2) Sets of chamber liners
Single carrier load lock
INFICON IC6 Quartz crystal rate controller, dual sensor head
(2) Turbo pumps
(2) Dry scroll pumps
Water pump
Water cooled stage, 15-35 RPM
Configured for 10" diameter carriers/6” Circular Wafer
Target turret, 4 Targets, 10" diameter
Deposition ion source:
ICP RF Source: 14 cm
Etch ion source:
ICP RF Source: 14 cm.
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