二手 GASONICS / NOVELLUS PEP 3510 Iridia #293752827 待售

Asher, 6" Dual chamber Component configuration: Cassette unit: Cluster PCM YASKAYA XU-CM 4730 Robot controller Chamber unit: (2) Lift and right PCM (2) MISC Controllers (2) Gas controllers (2) M/W Controllers (2) Lamp controllers (2) EUROTHREM 818S Temperature controllers (2) NIKON M680 Temperature controllers (2) ASTEK D13765 M/W Generator (Right side) (2) ENI ACG-6B RF Generators (2) MKS MWH-5 RF Matchers (2) MKS MWH-R RF Matcher boxes (2) MKS 600 Series Pressure controllers (2) MKS 638B-2-50-2 Pressure valves Gas supply: Gas name / Range / Size CF4 / 200 mm / 1/4" VAC N2 / 500 mm / 1/4" VAC O2 / 500 mm / 1/4" VAC HE / 2 SLPM / 1/4" VAC NF3 / 20 CC / 1/4" VAC O2 / 50 SCCM / 1/4" VAC Purge N2 / - / 1/4" VAC Utility description: Name / Description / Unit Power (AC) / ø3, 208V, 5wire, 150A, 50/60 Hz / Power Box PCW / QC6 Connector, 4EA / Chamber VAC / ISO 80, 2EA / Chamber CDA / 3 / 8" SWG Male, 2EA / Chamber.