二手 HITACHI HS‑9050 #293819579 待售
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ID: 293819579
晶圆大小: 12"
优质的: 2019
Dry Etcher / Plasma Asher, 12"
Used for copper processing
(5) Asher/Etch chambers
(2) Cooling chambers
Integrated transfer modules
Mini-Environment Wafer Loading Module (EFEM)
No Hard Drive Disk (HDD)
Power requirements: 150 A, 3-phase AC, 208 V
2019 vintage.
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