二手 HITACHI M 712XT #293750872 待售

ID: 293750872
优质的: 2006
Etcher EPD detectors with OES and EPD computer systems SHIMADZU Turbos EDWARDS IQDP and PUP Dry pump Dual zone temperature ESC HITACHI Robots (4) Floor chillers (3) Load ports (2) Etch process chambers Chamber 1: (8) Stick gas panels Chamber 2: (10) Sticks gas panels Dual wafer substations on transfer module Process kit included 2006 vintage.
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