二手 LAM RESEARCH 2300 Exelan #9054659 待售
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ID: 9054659
晶圆大小: 8"
优质的: 2004
Oxide etcher, 8"
Cass nest plastic, 8"
Wafer shape: SNNF (Semi notch no flat)
(4) Process chambers:
Position 1: 2300 Exelan
Position 2: 2300 Exelan
Position 3: 2300 Exelan
Position 4: 2300 Exelan
Front end load port cassette:
(3) Open cassettes
Backing pumps for TM iPX
User interface option: Side & front monitor UI
Earth leakage breaker ELB
Signal tower
SECS/ GEM
Platform type: Version 2
2300 Exelan options:
Chamber type 2300 Exelan CFE
Upper electrode heated
ESC Cooling dual zone
1600 L/S EDWARDS Turbo pump, 8"
Endpoint detection optical emission spectroscopy
Chamber isolation valve rocker gate valve
2300 Gas box:
Gas system type: Enhanced gas box II
Std stacking kits: 4 PM Stacking kit
Gas line 12 gas configuration
Gas box inlet option: Regulated inlet gas panel
Gas filters: Standard filter
Gas box configuration:
PM1 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM2 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 Line 10 NSR70%He/30%O2100 sccm NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM3 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM4 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
2300 Peripherals:
DFC Backing pumps cust supply
DFC TCU Config LAM supply: (4) 4080 Plus
Gas scrubber: EBARA GTE-3-0WVT
Power distribution module: RPDB
Dry pumps:
TM EDWARDS iPX 100A
PM1 EBARA AA100W
PM2 EBARA AA100W
PM3 EBARA AA100W
PM4 EBARA AA100W
No SMIF interface
2004 vintage.
LAM RESEARCH 2300 Exelan是一款高级蚀刻器/asher设备,专为满足各种高级工艺要求而设计。它是一个多工具平台,模块化且可扩展,以满足各种流程应用程序的需求。Exelan提供了多种可配置的参数和选项,可在很小的空间内提供卓越的性能。该系统配备了先进的磁控管源、包含实时反馈机的集成支持单元、先进的晶圆跟踪传输能力等先进技术。集成的先进磁控管源具有广泛的功率水平、频率和气体,为所有应用提供了卓越的精度和可重复性。Exelan的配置灵活性允许客户选择自己的定制级别,以最好地满足他们的特定要求。随附的实时反馈工具提供闭环控制,使精确度精确的配方能够轻松修改并应用于整个工具。2300 Exelan拥有先进的晶圆跟踪和传输功能,将精确对准、定位和位移传感器与先进的软件算法相结合,以实现无与伦比的过程控制和生产率。这一广泛的组件,加上集成的硬件、软件和通信功能,构成了一个强大可靠的高级、完全可用于生产的蚀刻平台的基础。Exelan还可以通过标准以太网连接提供远程支持,用于监视、诊断和升级。此资产使客户能够灵活地自定义其软件环境以满足自己的特定要求。LAM RESEARCH 2300 Exelan提供了一个高级、功能齐全的平台和灵活性,可满足各种应用需求。它的模块化设计允许可扩展性和可配置性,而其专有的控制模型则允许精确和可重复的过程。此用户友好平台可轻松升级以满足未来需求,并集成到现有生产线中。凭借其先进的磁控管源、集成的支持设备以及晶圆跟踪和传输能力，Exelan是任何工艺要求的理想选择。
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