二手 LAM RESEARCH 2300 Kiyo #174756 待售

Metal dry etch system, 12" Type of Loadport: SMIF Number of Process Chamber: (2) Metal Etch & (2) MWAVE STRPR Configuration of SMIF: Signal Tower: 3-colors Number of Loadport: 3 Parts No. of Loadport: 799-901175-004 Number of ATM Robot: 1 Parts No. of ATM Robot: 121668 Buffer Station: 25 slots, 2 Buffer Station Aligner: 1 Aligner Configuration of Transfer Chamber Number of Loadlock: 2 LL / 4 Slot Cool Chamber Model of Transfer Robot: Magnatran7 / Borrks Parts No. of Lock Valve: 853-007859-005 / 4ea TM Pressure Gauge: HPS Series907 / MKS TM Pressure Control: MKS Series640 LL Pressure Gauge: HASTING Configuration of Etch Chamber: PM2: Model of Chamber: 2300 Metal Year of Construction: 2005 Model of Pressure Gauge: MKS, 0.1Torr Model of Throttle Gate Valve: 65048-PH52-ADR1 VAT Model of Turbo Pump: ATH2300M Alcatel Model of TCP RF Generator: RFG / AE Model of Bias RF Generator: APEX1513 / AE Configuration of Etch Chamber: PM3: Model of Chamber: 2300 Metal Year of Construction: 2005 Model of Pressure Gauge: MKS, 0.1Torr Model of Throttle Gate Valve: 65048-PH52-ADR1 VAT Model of Turbo Pump: ATH2300M Alcatel Model of TCP RF Generator: RFG / AE Model of Bias RF Generator: APEX1513 / AE Configuration of MW Chamber: PM1: Model of Chamber: 2300 MWAVE STRPR Year of Construction: 04-2006 Model of Pressure Gauge: MKS, Dual range Model of Throttle Gate Valve: MKA, 253B-24836 Model of Vaporizer: MKS, WODMB-23398 Model of MW Generator: ASTEX, FI120160-3 Configuration of MFC: O2 5slm, N2 1slm Configuration of MW Chamber: PM4: Model of Chamber: 2300 MWAVE STRPR Year of Construction: 04-2006 Model of Pressure Gauge: MKS, Dual range Model of Throttle Gate Valve: MKA, 253B-24836 Model of Vaporizer: MKS, WODMB-23398 Model of MW Generator: ASTEX, FI120160-3 Configuration of MFC: O2 5slm, N2 1slm Configuration of Gas Panel, Etch Chamber: Type of Gas Panel: IGS Bolck Type No of Gas Channel: 8 Channel Model of MFC: UFG8561 PM2: BCL3 300sccm N2 50sccm Ar 500sccm O2 1slm CH4 50sccm SF6 200sccm Cl2 300sccm CHF3 50sccm PM3: BCL3 301sccm N2 51sccm Ar 501sccm O2 2slm CH4 51sccm SF6 201sccm Cl2 301sccm CHF3 51sccm Gas Box 1.25C Seal Type TMP Axiden ATH2300M Micro Wave Power Gen MKS FI20160-3 RF Generator AE APEX-1513 and AE RFDS-1213 Chiller Unisem RCS 2500A Power: 208VAC 3ph 4Wires 400AMPS 50/60Hz 2006 vintage.