二手 LAM RESEARCH 2300 Versys Kiyo #9152530 待售

Metal etcher, 12" Loadport: SMIF (EFEM) Metal core tool Process chamber: (2) Metal etchers (2) MWAVE Strips SMIF: Signal tower: (3) Colors (3) Load ports, 799-901175-004 ATM Robot, P/N: 151864 Buffer station: (25) Slots Aligner Transfer chamber: Load lock: (2) LL / (4) Slot cool chambers Model of transfer robot: Megatran7 / Brooks Parts no. of rocker valve: (4) 853-007859-9223 TM Pressure gauge: HPS Series 907 / MKS TM Pressure control: MKS Series 640 LL Pressure gauge: Hasting Etch chamber: PM2 & PM3: pressure gauge: MKS, 0.1 Torr Throttle gate valve: 65048-PH52-ADR1 / VAT Turbo pump: ATH2300M / Alcatel TCP RF generator: APEX2013 / AE Bias RF generator: APEX1513 / AE MW Chamber: PM1 & PM4: Model of chamber: 2300 MWAVE STRPR Throttle gate valve: 65048-PH52-ADR1 / VAT MW Generator: Revolution, 7690LAM-23 Configuration of MFC: Ar 2SLM O2 5SLM N2 1SLM Gas panel, etch chamber: PM2: Type of gas panel: 16-Line IGS gas box Type: Block 16-Gas channels MFC: SFC2480FAAPD2 Configuration of gas: O2 20 SCCM NF3 150/500 SCCM CF4 60/200 SCCM SF6 60/200 SCCM HBr 30/100 SCCM CH2F2 6/20 SCCM SiCl4 20 SCCM SiCl4 60/200 SCCM CHF3 30/100 SCCM Ar 150/500 SCCM N2 60/200 SCCM Cl2 15/50 SCCM O2 150/500 SCCM BCl3 50/200 SCCM CF4 15/50 SCCM Cl2 150/500 SCCM PM3: Type of gas panel: 16-Line IGS gas box Type: Block 16-Gas channels Model of MFC: SFC2480FAAPD2 Configuration of gas: O2 20 SCCM NF3 150/500 SCCM CF4 60/200 SCCM SF6 60/200 SCCM HBr 30/100 SCCM CH2F2 6/20 SCCM SiCl4 20 SCCM SiCl4 60/200 SCCM CHF3 30/100 SCCM Ar 150/500 SCCM N2 60/200 SCCM Cl2 15/50 SCCM O2 150/500 SCCM BCl3 50/200 SCCM CF4 15/50 SCCM Cl2 150/500 SCCM Power: 208 VAC, 3 phase, 4 wires, 400 A, 50 / 60 Hz 2009 vintage.