二手 LAM RESEARCH 2300e4 Kiyo EX #293619084 待售

Poly etcher, 12" (3) Load ports SEMI Wafer Cassette type: 25-Slots Gas box type: Jetstream 2300 Platform Chamber type: Versys Kiyo E Series 2300 Versys Kiyo E Series PTK Chamber Temperature controlled window HP Crystal window Coated ceramic injector Standard bayonet style injector shield Gas weldment with coated Standard injector shield Enhanced plasma screen SRC Enhanced grounded liner Top and side gas feed TCP Source: Plasma 2000 W Enhanced TCP Coil support: Bias match: 1.5 kW HVBP Electrostatic chuck: EPX ERMZ ESC Facility plate: Pl with routing ESC Hose kit: Low temperature Wafer lift mechanism: Prime movers Voltage control interface: 1200 V High bias kit Single piece QUARTZ edge ring Turbo pump, 12" OES2 Endpoint detection Standard chamber viewport window Heated foreline clamp cover Chamber isolation valve: Barrier seal door Vacuum valve: Viton Lower isolation valve: Valqua Chamber manometer UPC Enhanced Water control: Passive RF PCW control PCW Hoses: Chemical resistant Exhaust duct: Reduced profile Standard service cover Pump to TCU, 50 ft TCU to PM, 100 ft Interconnect: Pump to PM, 100 ft TCU to RPDB, 25 ft Pump to RPDB, 25 ft Regulated inlet gas panel Gas system: Jetstream Mounting location: Transport module Window door Lock-out tag-out manual valve FIB Facilitization Facility box: Top gas connection Enhanced containment Regulated with filter regulation Nickel filter SST Filter Future PM: 4 Positions Jetstream gases of 2302 Kiyo E Series: Tuning gas Heated lines position 1 and 2 Gas no / Gas / MFC Size / MFC Model 1 / SiCL4 / 100 SCCM / STEC Z719 2 / CL2 / 500 SCCM / STEC D219 3 / HBr / 500 SCCM / STEC D219 4 / CF4 / 400 SCCM / STEC D219 5 / BCl3 / 200 SCCM / MFC Z719 6 / He / 500 SCCM / STEC D219 7 / CH2F2 / 200 SCCM / STEC D219 8 / Ar / 1000 SCCM / STEC D219 9 / 30%HE/O2 / 50 SCCM / STEC D219 10 / NF3 / 1000 SCCM / STEC D219 11 / N2 / 250 SCCM / STEC D219 12 / SO2 / 200 SCCM / MFC D219 13 / SF6 / 200 SCCM / STEC D219 14 / CHF3 / 200 SCCM / MFC D219 15 / O2 / 500 SCCM / STEC D219 17 / C4F6 / 200 SCCM / MFC D219 ATM: Front end load port: 3 FOUP BROOKS Cassette ID: Hermos carrier ID Factory automation: OHT PIO Sensor Input buffer station: 25-Slot CTC Computer storage: Hard Disk Drive (HDD) mirrored VTM Load lock A and B: Standard RPDB Subpanel R-O-G-B Signal tower Pre-facilities: PM Peripherals backing pumps: ESR100WN RPDB Backing pump CB Size: 30 A TCU CB Size: 30A TCU YR-8020 2300 Versys Kiyo E Series process module (PM1, PM2, PM3 and PM4): SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2 Does not include: Dry pumps Hard Disk Drive (HDD) Power supply: 208 AC, 3 Phase 2012 vintage.