二手 LAM RESEARCH 2300e5 Exelan Flex FX #293699967 待售

Dielectric etcher, 12" (4) H2 Load ports (4) Chambers: PM1, PM2, PM3, PM4 Gas configuration: Line / Gas / Flow (SCCM): 1 / C4F6 / 200 2 / COS / 30 3 / O2 / 20 4 / O2 / 3000 5 / CH2F2 / 200 6 / C4F8 / 200 7 / O2 / 200 8 / Ar / 1000 9/ CHF3 / 200 10 / H2 / 300 11 / NF3 / 30 12 / N2 / 500 13 / CF4 / 200 14 / O2 / 10 15 / C4F6 / 10 16 / O2 / 10 17 / C4F6 / 10 Does not included Hard Disk Drive (HDD) Power supply: 208 AC 2015 vintage.