二手 LAM RESEARCH 9400 #9006154 待售
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ID: 9006154
Spare parts:
Qty - Part No. Description
10 - 716-038612-002 DC PLUG (9100)
89 - 742-008991-001 GASKET EMI(RECT CROSS SECTION)(1PC=1FT)
1 - 853-330281-001 ASSY RF SENSE BOX UPPER MATCH
2 - 799-432042-204 END EFFECTOR
3 - 799-432042-204 END EFFECTOR
2 - 685-094897-001 20MTORR MANOMETER
3 - 685-094898-001 500MTORR MANOMETER
1 - 660-094652-003 ESC POWER SUPPEY
10 - 796-007305-002 SCREW EIFT PIN
39 - 728-094726-012 SCREW ESC EACLOSURE
3 - 685-095610-001 10TORR MANOMETER
2 - 605-092466-002 OPTIC FIBER
1 - 797-900918-001 HELIUM UPC 50SCCM MFC
2 - 754-092082-002 BALL BEARING VAT
1 - 796-098651-001 HIGH PERFORMANCE VAUUM GREASE10MG
1 - 660-093818-002 BIAS GEN 4.0 MAHZ 2-5KW
1 - 810-441976-002 ASSY PCB
1 - 866-360231-012 PENDULUM VALVE
3 - 605-094988-001 ASSY PCB LASER
1 - 853-492319-001 TM VME
1 - 715-330825-006 LNR,CHMBR,AL,EXTND,ALLI
6 - 715-330180-010 ELCTD,BOT,FXD GAP ESC,LOW TEMP
5 - 734-000663-001 O-RING 1-3/4 ID X 1/8 V
6 - 715-012244-001 SHIELD BELLOWS INNER GATE
6 - 734-009013-001 O-RING 3/4 ID X 1/16 C/S VITO
6 - 734-005633-001 O-RING 1 7/8 X 3/32
51 - 742-007760-001 GASKET,RF (WIRE OVER ELAST)(1PC=1FT)
34 - 734-007461-001 O-RING 5.25 X 5 7/16 X 3/32
6 - 839-330423-001 WLDMT,NUPRO,MANO,ISO
1 - 715-330092-002 COV NUT BOT GAS FEED
6 - 796-095768-001 SHLD,SPLINTER,1K TURBO PMP
5 - 842-093390-040 KIT,REBUILD,LP VLVL
6 - 839-012255-001 BELLOWS INNER GATE
5 - 739-090783-001 CONTACT STRIP COPPER
3 - 734-061280-237 O-RING,VIT 2-237
5 - 796-091775-001 MILLIPORE, WAFERGUARD 2
4 - 734-092561-212 O-RING .139 DIA C/S FSI
35 - 796-000233-002 SEAL CENT. RING ASSY NW40
13 - 796-000233-005 SEAL, NW 16, CENTERING RING
5 - 734-061280-175 O-RING,VIT,SER2
5 - 734-092561-241 O-RING .139 DIA C/S FSI
10 - 734-092561-260 O-RING .139 DIA C/S FSI
25 - 734-008793-002 O-RING PERFLUORO (GAUGE WALL)
1 - 666-440485-00 PROBE TC J TYPE 2.38 ESC
2 - N-5100-024 BELLOW O-RING
8 - 720-000960-014 SCREW, SHC, UNC-21 1/4-20SST
16 - 720-000942-010 SCREW FLT HD SST 8-32X 5/
2 - 714-011010-001 SCREEN WINDOW
8 - 720-000960-008 SCREW SOC HD SST1/4 20 X 1/
4 - 734-001849-200 EPD POINT O-RING (8.75IDX1/8C/S)
2 - 734-007460-200 VIEW PORT O-RING (7.00IDX2/32C/S)
1 - VT-P205315 S65 DN200 LOCKING SEAL
1 - VT-N5111-374 SO2 46*236 ACTUATOR SEAL
2 - 684-093409-001 CABLE FIBER
1 - 685-094250-001 LASER MODULE IMW
1 - 660-098076-002 ESC DC POWER SUPPLY
12 - 853-331019-001 ASSY,R WDO,QIK CLN,E9400/E9600
12 - 853-331021-001 ASSY,L WDO,QIK CLN,E9400/E9600
20 - 718-098592-001 LOCKING R, HARD ANODIZED
20 - 718-098591-001 PENDULUM PL,HARD ANODIZED
12 - 853-331025-001 ASSY,Q/C,TOP COV,E9400/E9600
4 - 9100 FTS CHILLER
1 - 853-034112-006 ASSY,CA,J-TAPE T/C#8 RING LUG
1 - 660-097567-001 UPS,420VA,120VAC,50/60HZ
3 - 678-460687-001 HEATER CAST WATROD SPECIAL
1 - 853-491746-100 ASSY,DC PWR SUP,PM,TCP OXD
15 - D002010069 VITON O-RING 2-120
2 - 799-550716-001 Fxtr threta home Mag7 Robot
2 - 713-240548-001 ELCTD PTCTR ESC
1 - 518-410240-001 Fixture ALIGN END EFFECTOR
2 - 799-550689-001 Fixture MTGMAG7 ARM
1 - 799-550690-001 CA RS232 MAG7
1 - 515-032639-001 Tool cylinder height Adjust
5 - 515-031765-001 Tool align 4 pin LFTR Bellows
3 - 515-432084-001 ALIGNMTOOL VCE4 ALLI
1 - 002-2082-01 Tool LIPSEAL REMOVAL
1 - 001-5998-01 ASSY Fixture E/R Band TE
6 - 678-097859-003 HTR,V,FAST ACTING,ANGLE,PM
5 - 678-098055-002 HTR,V,ISLN,ANGLE,LOPRO
1 - 716-011624-001 RING INSULATOR LOWER ELECTROD
4 - 853-031556-019 ASSY HEATER CARTRIDGE 75 WATT
1 - 853-031556-019 ASSY HEATER CARTRIDGE 75 WATT
6 - 714-4324-13 BELT TIMING 116 VROOVES
1 - 799-550693R001 RFRB ASSY PCB MCC2A VCE6
1 - 714-015698-001 PNL,FOUP BLANK-OFF,ATM
1 - 853-550012-001 ASSY, DUAL, ARMS, STD
1 - 810-017021-001 ASSY PCB LIFTER FILTER
1 - 644-096863-002 Relay ,SS,Dual ,25A
1 - 715-390129-001 PL,MTG,PENDULUM V
2 - 715-014556-013 GASKET DRILLED VCR .013DIA
1 - 715-390128-001 PL,MTG,ADPTR,PENDULUM V
1 - 839-360109-001 WLDMT,LINE,He,EVAC CHMBR(SE)
1 - 839-360162-001 WLDMT,LINE,He,EVAC AOV9
1 - 734-005637-001 O-RING 6.984 X.139
1 - 715-032012-004 PLATE WINDOW CHAMBER CAPTIVE HDW
1 - 797-900918-003 UPC,UNIT,8130,HOV,ENH FC
1 - 853-330632-016 ASSY HTR CRTG 55W 16"LG
2 - 853-330632-026 ASSY HTR CRTG 55W 26"LG
1 - 853-330632-039 ASSY HTR CRTG 55W 39"LG
1 - 799-550530-001 ASSY WFR ROTB MDL
1 - 739-550096-001 SEAL SFT ROB
1 - 955-028895-003 TBG POLYURETHANE IB 85DUR 3/4
1 - 839-100488-001 WLDMT,VLV, FLTR,VCE VNT, R
4 - 734-550499-001 O-RING,CASS CHMBR
1 - 810-017082-004 ASSY PCB 16 CHAN HTR CNTRL
1 - 853-370702-002 ASSY,HTR CRTG,55W
4 - 716-099277-001 INSUL PL CHAMBER TO VLV
3 - 739-007783-001 O-RING 12.475 ID X .275 CS
1 - 715-011617-002 RING RETAINING
1 - 715-550264-001 FXTR AGV ARM SETUP VCE-4
2 - 713-020033-001 FXTR LEVEING SINGLE AXIS AC
1 - 715-550122-001 TOOL INSNG WRIST BAND
2 - 524-004640-001 FXTR ROBOT HOME POS VTM SCARA
7 - 853-015982-001 ASSY MANUAL CONTROL BOX AUTOTU
1 - 685-491921-001 RMT CONT UNIT
4 - 853-015030-001 ASSY MANUAL CONTROL BOX AUTOTU
5 - 734-061280-279 O-RING VITON 12.984ID
5 - 734-061978-203 O-RING CHEMRAZ SERIES2,-203
5 - 842-092162-001 KIT REBUILD EDWARDS.
LAM RESEARCH 9400 Etcher/Asher是一款最先进的等离子体蚀刻/反应性离子蚀刻(RIE)设备,旨在满足半导体制造和医药生产的需要。该系统基于多轴机械臂,用于将粉末和液体移离工区并装载基材。该机器人还用于监控蚀刻过程,并将资源放置在适当的位置进行蚀刻。该单元包括多个高精度组件,如直流等离子体源、用于等离子体生成的射频源、用于功率匹配的射频匹配网络和一个特殊的样品支架。直流源提供感应耦合等离子体进行蚀刻或灰化,并产生恒定、稳定的等离子体爆裂,这是蚀刻所必需的。射频源提供蚀刻所需的能量,射频匹配网络优化并调整射频功率至所需水平。特殊的样品支架设计用于在蚀刻时固定基板,并确保工艺的均匀性。机器高度自动化,可以编程为连续和在不同的程序上蚀刻多个基板。它还能够蚀刻包括硅片、单晶石英、二氧化硅在内的多种材料。此外,该工具还具有最大厚度为400微米、最小尺寸为1.5x1.5毫米的基板。9400 Etcher/Asher具有高精度、高速度和高可靠性,能够以最高的精度和精确度处理各种基板。此外,它在很长一段时间内被证明是极其可靠的,并且具有巨大的生命周期成本。其独特的设计允许轻松维护和低拥有成本。该资产是半导体制造和医药生产的理想选择,为用户提供了取得优异蚀刻效果所必需的工具。
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