二手 LAM RESEARCH Alliance A6 9400 DFM #198258 待售

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图为 已使用的 LAM RESEARCH Alliance A6 9400 DFM 待售
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刻蚀机、去胶机
製造商
LAM RESEARCH
模型
Alliance A6 9400 DFM
ID: 198258
Poly Etcher, 8" (3) Chamber modules to include: (1) Model 9400PTX (2) Model 9400DFM (3) LAM Enhanced Research Lab Gas Boxes (1) Control Rack with Noah Precision Models PSC-8000 and PSC-4400 Modules (2) Edwards Dry Pump Systems Software: Envision Platform: Alliance A6 Process: poly Process modules: DFM Gas box style: external orbital gas box individual door Interface: front and rear Main frame: though the wall bulkhead Transport module spec: Robot: Mag 7 End effector: standard stainless steel Load lock: Brooks automatic Station 6: Aligner Process module 1: Process: poly etch Process module: DFM Turbo: Edwards 1600 seiko seiki Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard TCP extended range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers present Gas lines: non heated Process module 2 Process: poly etch Process module: DFM Turbo: Alcatel 1600m Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard tcp exteneded range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers: present Gas lines: non heated Process module 3 Process: poly etch Process module: DFM Turbo: Alcatel 1600m Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard tcp exteneded range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers: present Gas lines: non heated Pumps Edwards IQDP 80/500 Chiller Noah solid state Gas box Mfc Unit series with metal seals Includes: Gib options STD Stacking kit Gas box mounting location: remote Quick clean kit TCU hosing: 50ft TCU configuration: Noah solid state Operating temperature: 60 - 80c Tm exhaust: upper 2002 vintage.
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LAM RESEARCH Alliance A6 9400 DFM是业界领先的具有高级功能的蚀刻器/asher。该机设计为各种配置，具有卓越的设备灵活性，增加了两个独立的工艺模块，使元件和晶片能够精确蚀刻，具有出色的特征重复性。其水平沉积工具具有良好的均匀性控制，是半导体器件生产中晶片精密蚀刻或灰化的理想工具。LAM RESEARCH ALLIANCE A6 9400DFM 蚀刻器/asher能够在一个过程中进行高速晶圆蚀刻和灰化。它能够以精确到0.05 µm/s以内的设定点监测率（SPM）控制蚀刻过程，以获得最佳的重复性。此外,该机器还具有最先进的软件和质量控制功能,可实时监控蚀刻过程并确保最大程度的一致性。Alliance A6 9400 DFM采用高效沉积工具和先进的电子束和ICP源系统设计，具有强大的过滤能力，使其效率极高，提供高质量的效果。高级硬件功能（如实时数据捕获和过程参数记录）提高了可重复性。图层控制系统提供统一控制和实时诊断功能,使其成为各种高端蚀刻过程的绝佳选择。ALLIANCE A6 9400DFM 蚀刻器/asher还提供各种工艺模块和选项,使其能够针对各种应用进行定制。由于先进的漏电检测器和晶圆保护模块，其先进的闸室保护装置保证了最大的保护和寿命可靠性。此外,该机还具有集成的机器诊断功能,以确保高效维护。总体而言,LAM RESEARCH Alliance A6 9400 DFM是一款先进、可靠、灵活的蚀刻器/asher,可提供卓越的刀具控制、可重复性和准确性。其大功率电子束和ICP源系统使其具有出色的过滤和过程控制能力，使其成为各种半导体器件生产应用的绝佳选择。其先进的资产诊断和泄漏检测模型保证了最大限度的保护和更长的使用寿命。因此，LAM RESEARCH ALLIANCE A6 9400DFM是控制和可重复蚀刻、灰化以及其他各种设备制造工艺的绝佳选择。
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