二手 LAM RESEARCH Alliance A6 9600 #9354470 待售

Etcher, 8" Install type: Through the wall Integrated gas panel No SMIF PM 1: Microwave PM 2: 9600 PTX PM 3: 9600PTX PM 4: Microwave PM 5: Aligner PM 6: Cool station Electrostatic chuck On process turbo pump channels VAT65 Turbo gate valve Endpoint detection system Photodiode endpoint End point 1 P/N: 853-540066-011 CD Rom manuals Alliance mainframe: MAG7 Robot Dual blade Rotational VCE6 with dynamic seal Signal lamp tower Gate valve: Heated (PM2, PM3) Turbo pump (PM2 and PM3): SEIKO SEIKI H1303CV3 Turbo pump RF / Microwave generator: MKS CPS PM 1 Top ADVANCED ENERGY RFG 1250 PM 2 Top ADVANCED ENERGY RFG1250 HALO PM 2 Bottom ADVANCED ENERGY RFG 1250 PM 3 Top ADVANCED ENERGY RFG 1250 HALOPM 3 Bottom MKS CPS PM 4 Top Chiller: One/Two cooling channels Quantity: Up to 4 Gas box configuration: PM1: Gas line / Make / Model / Flow (SCCM) / Gas 1 / TYLAN / FC-2950MEP5 / 1000 / N2 3 / TYLAN / FC-2950MEP5 / 5000 / O2 PM2: Gas line / Make / Model / Flow (SCCM) / Gas 1 / STEC / - / - / BCL3 2 / STEC / - / - / CL2 3 / TYLAN / FC-2950MEP5 / 200 / N2 4 / TYLAN / FC-2950MEP5 / 200 / O2 5 / TYLAN / FC-2950MEP5 / 100 / CHF3 6 / TYLAN / FC-2950MEP5 / 50 / AR PM3: Gas line / Make / Model / Flow (SCCM) / Gas 1 / TYLAN / FC-2900MEP5 / 200 / BCL3 2 / TYLAN / FC-2900MEP5 / 200 / CL2 3 / TYLAN / FC-2900MEP5 / 200 / N2 4 / TYLAN / FC-2900M / 200 / O2 5 / TYLAN / FC-2950MEP5 / 100 / CHF3 6 / TYLAN / FC-2950MEP5 / 50 / AR PM4: Gas line / Make / Model / Flow (SCCM) / Gas 1 / TYLAN / FC-2950MEP5 / 1000 / N2 3 / TYLAN / FC-2950MEP5 / 5000 / O2 No standard manuals.