二手 LAM RESEARCH Autoetch 490 #293697198 待售

ID: 293697198
Plasma etcher, 6" Type: Single-wafer processing Configurable for 3"-6" TFT Monitors upgraded Wafer detection Fully automated microprocessor control Cassette-to-cassette wafer processing Vacuum load locked Programmable variable electrode spacing Endpoint detection Stand-alone or bulk-head mount ENI RF Generator No chiller No pump.
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