二手 LAM RESEARCH TCP 9600 SE II #293826656 待售
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ID: 293826656
优质的: 2005
Etcher
Upper and lower RF Match
Upper and Lower Al electrode
QUARTZ TCP Disk
Ceramic GDP
Wafer clamp
Focus ring
Filler ring
Chamber pressure gauge
Pressure gauge
WAP Manometer (4500)
Vacuum switch
ATM Switch
He cooling loop
EPD
Gap motor and component
Gap controller
Roughing valve
(2) AC Pressure control valves
(2) AC Pressure controllers
PS and AC Enclosure
SSR
GFI
16CH Heat / Cool PCB
CB / TB
IO Mother board
Transceiver
ESC
ESC Power supply
Indexer
Shuttle Assy
Edge finder
TMP (TCP):
TMP Controller
(3) Torr manometers
(10) Torr manometers
Purge line
Pumping line
Bypass valve
Fast acting valve
Heat jacket
Purge MFC
Solenoid bank
Turbo Interlock board
Coolant valve
Paddle
Funnel spacer
Wafer sensor
Assy RF Match
Auto tune PCB
(50) Isolation valves
Throttle Valve
(2) AC Controllers
(2) AC Indicators
Primary valve
Secondary valve
Water tank
MFC Controller
Heat jacket - MFC and Water tank
Tank level sensor
MFC TC
Tank TC
Chuck
Lifter
Nozzle
TC / Temp control PCB
Motor control PCB
Assy water hand valve
Pneumatic valve
Regulator / Filter
Solenoid bank
Speed control bank
APM Solenoid bank
Control PCB
User interface
CRT and LCD
Key pad (Classic)
Key board
Floppy driver
PC (Envision)
Light pen
Mouse
Ethernet hub
VME:
68030/CPU
ADIO5
Address
STP-SHT
STP-X-R
Entrance and exit load lock:
Assy inner and outer door
Assy harmonic drive
Assy arm housing
Slow pumping valve
Isolation valve
Wafer sensor
Gasses:
SF6
O2
CL2
C2F6
He Manometer
He UPC
2005 vintage.
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