二手 MATRIX System One #9201831 待售
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ID: 9201831
晶圆大小: 6"
Stripper, 6"
Included ranging:
50mm up to 150mm
The system optimizes vital device parameters:
Enhanced gate oxide integrity
Reduced threshold and capacitance voltage shifts
Reduced contact resistance / Oxidation
Photoresist Stripping:
High dose implant
Post-polysilicon etch
Post-metal etch
Post-oxide etch
Controlled resist removal:
Post-develop descum (pre-etch)
Dry / wet process capability
Uniformity capability (<5% 1σ)
GaAs, InP wafer strip and descum
Thin film head resist cleaning
Opto-electronic devices cleaning
MEMS
Single wafer multi-Step Processing:
Precisely controlled & repeatable stripping of each wafer
(3) programmable steps + overstrip
Capable of long process times for exceptional control
High throughput:
35 WPH on 150mm substrate
Aluminum Wafer Chuck:
Fast
Precise
Uniform removal of resist
Low Particles:
0.1 particles (>0.3μm) added per cm2
Proven System Performance:
700 System ones in use worldwide
95% uptime
Proven Reactor Design:
Closed-loop temperature control
Stable range for strip:
150°C – 250ºC (+/-5°C)
For descum:
70°C – 150ºC .
MATRIX Equipment One是一款最先进的蚀刻器和asher,用于在金属表面上激光标记元件。它非常适合工业标记应用,因为它适用于蚀刻坚韧的材料以及软金属,如铝、钢、黄铜、不锈钢、钛和铜。从蚀刻器和asher发出的激光束精确准确,可以快速容易地进行标记。System One的设计紧凑耐用,使用维护方便。其可调的底座允许对激光束进行精确的控制,并确保一致的结果。直观的控制面板使控制设置、调整参数和预览设计在提交过程之前变得容易。内置的安全功能确保了安全性和耐用性,同时还允许轻松清洁。该单元还包括一个光纤扫描仪,读取所需的材料,并确保激光束正确定位。此功能可确保精确度和精确的图桉,无论蚀刻或粉刷的材料如何。自动化软件允许轻松定制和精确复制模式,其复杂的成像算法保证精确的标记。该机器还可以轻松使用各种图形和CAD软件,从而实现快速轻松的设计。激光标记工艺的速度和精度使其成为多种工业和商业应用的理想选择。它非常适合在各种材料上标记库存部件、序列号、产品代码、条形码和徽标。蚀刻或ashed标记的大小也令人印象深刻,允许在短时间内创造出大量的高品质标记。MATRIX Tool One提供高速、精确的激光标记。它的特点、准确性和耐用性使其成为工业应用的理想选择,也是任何想要产生质量一致结果的人的理想选择。无论是标记金属还是其他材料,资产一号都是最好的选择。
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