二手 MATTSON Aspen III #293695997 待售
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ID: 293695997
晶圆大小: 12"
优质的: 2004
ICP System, 12"
Front interface
Transfer module
Transfer robot
AC Rack
(2) Process modules (Chamber 2 and 3)
(4) Load ports
(2) Guardrails
(4) Faraday shields, Quartz tubes and Screws
Power cable, 7 M
(2) Signal cables: 30 M
(2) VAT Valves
Monitor
PC
Endpoint detector PC
2004 vintage.
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